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Nikon VMA & VMR Series VMM

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CNC Video Measuring System NEXIV VMA series CNC Video Measuring System Wide FOV Model

Nikon offers the ultimate usability for a wide variety of measuring applications with the wide FOV, long XYZ stroke iNEXIV VMA series. --- Automatically measures various components, such as plastic injection molds and electronic parts, with high accuracy and repeatability --- Allows measurements of tall and uneven objects with the long working distance of 73.5 mm Three models in the iNEXIV VMA series are available, each with a different XY-stroke. Wide ﬁeld of view and sharp, clear images A wide FOV of up to 13 mm x 10 mm (at Optical magniﬁcation 0.35× 0.6× 1× 1.8× 3.5× 0.35x) allows easy search and alignment 13.3× 1.33× of measuring targets. The 10x zoom with FOV size on stage Horizontal × 10.0 7.8× 4.7× 2.6× 1.00 ﬁve speciﬁc steps provides accurate Vertical (mm) 5.8 3.5 1.9 measurement as well as high-resolution 12.6 126 images. An excellent Apochromat objective 1/3” CCD size Horizontal × 21.8 4.8×3.6 2.15 lens with high NA (0.11) and low distortion has Vertical (mm) 0.126 1.26 been specially designed for the iNEXIV series, 1.26 12.6 providing crisp, clear images. Video magniﬁcation 12.6 36 126 Total magniﬁcation on 21.6 36 64.8 Video Window (640 × 480 pixels)* Size of 1 pixel (micrometer) 12.6 7.36 4.25 0.216 0.36 0.648 Size of objects on 0.01× (mm) Video Window 0.1× (mm) 2.16 3.6 6.48 1× (mm) 21.6 36 64.8 (640 × 480 pixels) * Total magniﬁcation is that of video window with 640 × 480 pixels on 24 inch WUXGA monitor (1920 × 1200 pixels) recommended for VMZ-R series. Smartphone charger 0.35x 0.6x 1x 1.8x 3.5x 13.3 mm (W) x 10.0 mm (H) 7.8 mm (W) x 5.8 mm (H) 4.7 mm (W) x 3.5 mm (H) 2.6 mm (W) x 1.9 mm (H) 1.33 mm (W) x 1.0 mm (H) Robust 73.5 mm working distance Large XY stroke and long Z stroke A long working distance Three models with different XY strokes are available: minimizes the possibility of 250 x 200 mm, 450 x 400 mm and 650 x 550 mm contact between the objective An extended 200 mm Z-axis stroke is perfect for tall lens and valuable samples. samples. Ideal for measuring large step heights and deep holes. Working distance 73.5 mm 2

Three models with different XY strokes to suit various sample sizes 250 mm(X) × 200 mm(Y) × 200 mm(Z) – Standard stroke iNEXIV VMA-2520 A space-saving, low-cost model suited to measure small samples, such as electronic and die cast parts. Stroke 250 (X) x 200 (Y) x 200 (Z) mm Measuring head travel Z direction (single column type) Stage travel X-Y direction 450 mm(X) × 400 mm(Y) × 200 mm(Z) – Middle stroke iNEXIV VMA-4540 Suitable for mid-size samples, such as molded and pressed parts. Stroke 450 (X) x 400 (Y) x 200 (Z) mm Measuring head travel X-Y direction (bridge type) Stage travel Y direction 650 mm(X) × 550 mm(Y) × 200 mm(Z) – Large stroke iNEXIV VMA-6555 Suitable for large sample and simultaneous measurement of multiple parts. Stroke 650 (X) x 550 (Y) x 200 (Z) mm Measuring head travel X-Y direction (bridge type) Stage travel Y direction 3

Features Fast and accurate vision AF (Auto Focus) The high-speed vision AF offers high-repeatability and high-precision for height and depth measurement. Non- contact measurement using the vision AF does not damage or deform parts. Even the bottom of a small hole can be focused. Top surface of implant Mid-depth of implant Mid-depth of implant Bottom of implant Versatile illuminations The iNEXIV VMA series is equipped with episcopic (top), diascopic (bottom) and 8-segment ring (with 18-degree oblique angle) LED illuminators. Combining these illuminators with superior optics provides accurate detection of low contrast edges. Any 8-segment light can be selected for effective edge detection. Top light Ring light from left side Ring light from rear side Ring light from right side Intelligent search Even when a sample is misaligned, the system automatically 1 2 3 searches the target location based on the target image recorded in a teaching ﬁle. This enables accurate, automatic Recorded measurement by eliminating possible detection errors. image 1 Target is detected 2 Searching the misaligned target 3 Target is detected Misaligned target can be automatically detected using intelligent search XY coordinate XY coordinate after searching the target Digital chart comparator Deviation of contours can be checked by overlaying charts generated digitally from 2D CAD data onto video images. Digital charts always accompany video images. 4

Software User-friendly standard software iNEXIV VMA AutoMeasure Provides enhanced ease of use and versatility based on Nikon’s years of extensive experience in developing the NEXIV series. Main program layout Teaching ﬁle selection with interactive guides CMM-Manager A multi-platform metrology software to create teaching ﬁles that include 2D video measurement and 3D tactile measurement, and to provide easy operation for 3D graphic window. Accurate feature measurement ImageFit QC Custom Fit QC Creates inspection reports according to any designated Measurement results are read into 10 different templates format. Measurement results can be automatically and pass/fail results and calculation results*1 are reﬂected with pass/fail results and statistical results*. Line automatically exported. Graphs*2, including X-R control graphs and histograms can also be created as needed. charts and scatter diagrams, can be automatically generated to visualize measurement results. *standard deviation, process capability index (Cp, Cpk) *1: Average, maximum value, minimum value, range, standard deviation, *Excel is required and process capability index (Cp, Cpk) Codeveloped by Aria Co., Ltd. (Japan) *2: Line graphs, histograms, X-R control charts, scatter diagrams *Excel is required Codeveloped by Aria Co., Ltd. (Japan) Parameter Settings Report of Measurement Results Other Optional software NEXIV EDF/Stitching Express iNEXIV VMA Proﬁler/CAD Reader Image analysis and archiving program for creating an all-in-focus EDF (Extended Depth of Focus) image from 2D proﬁle shape analysis program multiple images at different Z axis. This also generates a stitched image with super wide FOV from multiple iNEXIV VMA Virtual AutoMeasure images on the same XY plane. CAD interface off-line teaching support program 5

Optional Hardware Touch probe for measurement of imperceptible parts The iNEXIV VMA series can accommodate optional Renishaw® TP20 or TP200 touch probes. Touch probes provide measurements where vision AF cannot be used, such as the inner diameter of an oil seal or the clearance angle of an indexable insert. Measurement can be easily switched between video and touch probe, and both can be controlled by one teaching ﬁle. TP200 Inner diameter of oil seal Clearance angle of insert Extended 1.5x high-magniﬁcation Smartphone charger Each model can be modiﬁed before shipment to extend the magniﬁcation to 1.5x, powerful enough for precise measurement of minute electronic parts. *Video measuring images are slightly darker with the 1.5x high-magniﬁcation option, even with the same light intensity setting (0 - 100). 0.52x 0.9x 1.5x 2.7x 5.2x 8.9 mm (W) x 6.7 mm (H) 5.2 mm (W) x 3.9 mm (H) 3.1 mm (W) x 2.3 mm (H) 1.9 mm (W) x 1.3 mm (H) 0.89 mm (W) x 0.67 mm (H) Laser AF 63 mm With a working distance of 63 mm, the optional Laser AF enables height working measurement of ﬂat surfaces with high repeatability, while keeping a wide distance FOV at low magniﬁcation. 6

Dimensional Diagram VMA-2520 Measurement range �� Controller: 145×400×390 mm / 14 kg with TP20 with �� 10 mm stylus �� (without MCR20) �� Vision/TP �� PC rack (for all models) �� offset (X) �� (with MCR20) �� Vision/TP �� offset (X) �� Main body with table: 650×700×1557 mm, 110 kg �� Unit: mm Unit: mm VMA-4540 Measurement range �� with TP20 with �� 10 mm stylus �� (without MCR20) �� Vision/TP offset (X) �� (with MCR20) �� Vision/TP offset (X) �� Main body with table: 1000×1340×1553 mm, 500 kg �� Unit: mm VMA-6555 �� Measurement range �� with TP20 with �� 10 mm stylus �� (without MCR20) �� Vision/TP offset (X) �� (with MCR20) Vision/TP �� offset (X) �� Main body with table: 1200×1640×1553 mm, 665 kg �� Unit: mm �� Top view VMA-2520 VMA-4540 VMA-6555 of stage �� Unit: mm �� 7

Speciﬁcations Model VMA-2520 VMA-4540 VMA-6555 XYZ Strokes 250×200×200 mm 450×400×200 mm 650×550×200 mm Measurement range with TP 400×400×166 mm (TP20) 600×550×166 mm (TP20) (Touch Probe) 200×200×166 mm (TP20) 400×400×170 mm (TP200) 600×550×170 mm (TP200) 200×200×170 mm (TP200) 450×400×200 mm (with Vision AF) 650×550×200 mm (with Vision AF) Measurement range 250×200×200 mm (with Vision AF) 325×400×166 mm (TP20) 525×550×166 mm (TP20) with TP & MCR20*1 325×400×170 mm (TP200) 525×550×170 mm (TP200) 175×200×166 mm (TP20) 375×400×200 mm (with Vision AF) 575×550×200 mm (with Vision AF) Minimum readout 175×200×170 mm (TP200) Maximum sample weight 225×200×200 mm (with Vision AF) 40 kg 50 kg Maximum sample weight (accuracy guaranteed) 0.1 µm Maximum permissible error*2 (L = Length in mm) 15 kg Camera 5 kg 20 kg 30 kg Working distance Magniﬁcation EUX,MPE EUY,MPE: 2+8L/1000 µm EUX,MPE EUY,MPE: 2+6L/1000 µm EUXY,MPE: 3+8L/1000 µm EUXY,MPE: 3+6L/1000 µm FOV size on stage EUZ,MPE*3: 3+L/50 µm EUZ,MPE*3: 3+L/100 µm Autofocus Illumination Black & white 1/3” CCD, Color 1/3” CCD (option) Video resolution 73.5 mm (63 mm with Laser AF) Touch probe (optional) Power source Optical: 0.35 to 3.5x (0.52x to 5.2x high magniﬁcation is available as an option) Power consumption On screen: 12.6 to 126x with 24-inch WUXGA (1920×1200 pixels) monitor 13.3×10 mm to 1.33×1 mm (8.9×6.7 mm to 0.89×0.67 mm with high-magniﬁcation option) Vision AF, Laser AF (option) Contour illumination and Surface illumination: White LED diascopic illumination Oblique illumination: 8-segment white LED ring illumination 640×480 pixels Renishaw® TP200/TP20 100 V-240 V, 50/60 Hz 5 A (100 V) - 2.5 A (240 V) *1: The iNEXIV-dedicated MCR20 can be used for both TP20 and TP200. *2: Nikon's in-house test at 20°C ±0.5k *3: With TP or Laser AF Nikon Corporation Industrial Metrology Business Unit is certiﬁed as Date of initial accreditation: July 1, 2009 an ISO/IEC 17025 accredited calibration laboratory for CNC video Scope of accreditation: Coordinate measuring instruments measuring systems by the IAJapan (International Accreditation Accredited section: CS Promotion Department Japan) as Accreditation No.JCSS0241. Industrial Metrology Business Unit Calibration site: Customer’s laboratory (ﬁeld service) ISO/IEC 17025: International standard, which speciﬁes the general Calibration and Measurement requirements to ensure that a laboratory is competent to carry out Capability (CMC), (K=2, Level of L ≤ 420mm: 0.32 µm speciﬁc tests and/or calibrations Conﬁdence Approximately 95%) 420 ≤ L ≤ 1000mm : (0.29 + 0.64 × L/1000) µm [L=measurement length (mm)] Speciﬁcations and equipment are subject to change without any notice or obligation on the part of the manufacturer. March 2020 ©2014-2020 NIKON CORPORATION N.B. Export of the products* in this brochure is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedures shall be required in case of export from Japan. *Products: Hardware and its technical information (including software) Company names and product names appearing in this brochure are their registered trademarks or trademarks. NIKON CORPORATION ISO 14001 Certiﬁed Shinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, Japan for NIKON CORPORATION phone: +81-3-6433-3701 fax: +81-3-6433-3784 https://www.nikon.com/products/industrial-metrology/ ISO 9001 Certiﬁed for NIKON CORPORATION Industrial Metrology Business Unit NIKON METROLOGY EUROPE NV NIKON METROLOGY, INC. NIKON MALAYSIA SDN BHD Geldenaaksebaan 329, 3001 Leuven, Belgium 12701 Grand River Avenue, Brighton, MI 48116 U.S.A. MALAYSIA phone: +60-3-7809-3688 fax: +60-3-7809-3633 phone: +32-16-74-01-00 fax: +32-16-74-01-03 phone: +1-810-220-4360 fax: +1-810-220-4300 PT. NIKON INDONESIA E-mail: [email protected] E-mail: [email protected] INDONESIA phone: +62-267-864-3949 fax: +62-267-864-3950 http://www.nikonmetrology.com/en-gb http://www.nikonmetrology.com/en-us E-mail: [email protected] NIKON METROLOGY UK LTD. NIKON CANADA INC. UNITED KINGDOM phone: +44-1332-811-349 fax: +44-1332-639-881 CANADA phone: +1-905-602-9676 fax: +1-905-602-9953 NIKON SALES (THAILAND) CO., LTD. THAILAND phone: +66-2633-5100 fax: 66-2633-5191 E-mail: [email protected] NIKON MEXICO- Metrology Showroom MEXICO phone: +52 (442) 688 50673 NIKON INDIA PRIVATE LIMITED NIKON METROLOGY SARL INDIA phone: +91-124-4688500 fax: +91-124-4688527 FRANCE phone: +33-1-60-86-09-76 fax: +33-1-60-86-57-35 E-mail: [email protected] E-mail: [email protected] NIKON INSTRUMENTS (SHANGHAI) CO., LTD. CHINA (Shanghai branch) phone: +86-21-6841-2050 fax: +86-21-6841-2060 NIKON METROLOGY GMBH (Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026 GERMANY phone: +49-6023-91733-0 fax: +49-6023-91733-229 (Guangzhou branch) phone: +86-20-3882-0551 fax: +86-20-3882-0580 E-mail: [email protected] NIKON INSTRUMENTS KOREA CO., LTD. KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415 NIKON INSTRUMENTS S.p.A. ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93 NIKON SINGAPORE PTE LTD. SINGAPORE phone: +65-6559-3651 fax: +65-6559-3668 Printed in Japan (2003) Am/M E-mail: [email protected] Code No.2CE-IJBH-5

CNC Video Measuring System NEXIV VMZ-R series CNC Video Measuring System Standard Model

Series Optical Heads Type 1, 2 and 3 -- Standard magniﬁcation zooming heads 0.5×~7.5× 1×~15× 2×~30× Printed circuit board Printed circuit board High density PCB (optical magniﬁcation 1×) (optical magniﬁcation 2×) (optical magniﬁcation 1×) Type 1 / 8 segment LED ring light Type 2 / 8 segment LED ring light Type 2 / coaxial top light Type 4 and TZ -- High magniﬁcation zooming heads 4×~60× 1×~7.5×/16×~120× High density PCB IC chip High density PCB (optical magniﬁcation 16×) (optical magniﬁcation 8×) (optical magniﬁcation 16×) Type TZ / dark ﬁeld illumination Type 4 / coaxial top light Type 4 / coaxial top light 0.35×~3.5× Type A - Wide FOV zooming head Plastic molded part Plastic molded part Resin parts (optical magniﬁcation 0.35×) (optical magniﬁcation 0.6×) (optical magniﬁcation 0.35×) Coaxial top light Coaxial top light 8 segment LED ring light Optical magniﬁcation 0.35 0.5 0.6 1 1.8 2 Type 1 Standard magniﬁcation zooming heads Type 2 Type 3 High magniﬁcation zooming heads Type 4 Type TZ Wide FOV zooming head Type A FOV size on stage Horizontal (mm) × Vertical (mm) 13.3 9.33 7.8 4.7 2.6 2.33 10.0 7.01 5.8 3.5 1.9 1.75 12.6 Total magniﬁcation on PC monitor 18 21.6 36 64.8 72 2 * Total magniﬁcation is that of video window with 640 × 480 pixels on 24 inch WUXGA monitor (1920 × 1200 pixels) recommended for VMZ-R series.

Stage Sizes 300mm(X) × 200mm(Y) × 200mm(Z) – Standard stroke Suitable for small components used for products such as mechanical, electric/ electronic, automotive, and medical devices. Connectors, semiconductor packages, small PCB’s, small stamped sheet metal parts, lead frames, watch components, etc. High density PCB’s, lead frames, semiconductor packages, MEMS, probe cards, etc. Plastic molded parts, sheet metal parts, rubber parts, mechanical parts, implant components, watch components, etc. 450mm(X) × 400mm(Y) × 200mm(Z) – Middle stroke Designed for middle size components and/or series measurements of multiple pieces on the stage. Middle size PCB’s, stamped sheet metal parts, etc. 300mm wafers, 300mm probe cards, etc. Middle size mechanical parts, plastic molded parts, etc. 650mm(X) × 550mm(Y) × 200mm(Z) – Large stroke Suitable for large size components and/or \"step-and-repeat\" measurements of multiple pieces on the stage. Large PCB’s, large plastic molded parts, etc. High density large PCB’s, etc. Large stamped sheet metal parts, Large plastic molded parts, etc. 3.5 4 7.5 8 15 16 30 32 60 64 120 1.33 1.165 0.622 0.582 0.311 0.291 0.155 0.146 0.078 0.073 0.039 1.00 0.875 0.467 0.437 0.233 0.218 0.117 0.109 0.058 0.055 0.029 126 144 270 288 540 576 1080 1152 2160 2304 4320 3

Type 1, 2 and 3 – Standard magniﬁcation zooming heads Equipped with excellent Nikon optics Zooming heads are equipped with 15x zoom optics made exclusively for the NEXIV VMZ-R series. These Nikon optics feature a long working distance, a high NA of 0.35, low distortion, and low magniﬁcation error. Optical magniﬁcation 0.5 1 2 4 7.5 8 15 16 30 Type 1 (0.5 to 7.5×) Magniﬁcation Type Type 2 (1 to 15×) Type 3 (2 to 30×) FOV size on stage Horizontal × 9.33 4.7 2.33 1.165 0.622 0.582 0.311 0.291 0.155 Vertical (mm) 7.01 3.5 1.75 0.875 0.467 0.437 0.233 0.218 0.117 1/3” CCD size Horizontal × 18 36 72 144 4.8 × 3.6 288 540 576 1080 Vertical (mm) 14.7 7.36 3.68 1.84 0.82 0.48 0.46 0.24 0.18 0.36 0.72 1.44 36 2.88 5.76 10.8 Video magniﬁcation 1.8 3.6 14.4 270 28.8 5.4 57.6 108 7.2 144 288 54 576 1080 Total magniﬁcation on Video Window 18 36 72 0.98 540 16 30 0.5 1 2 4 2.7 8 15 (640 × 480 pixels) 27 270 Size of 1 pixel (micrometer) 7.5 Size of objects on 0.01× (mm) Video Window 0.1× (mm) 1× (mm) (640 × 480 pixels) Optical magniﬁcation * Total magniﬁcation is that of video window with 640 × 480 pixels on 24 inch WUXGA monitor (1920 × 1200 pixels) recommended for VMZ-R series. TTL Laser AF with 50mm working distance (TTL - Through the lens) Type 1, 2 and 3 zooming heads are equipped with TTL Laser AF with a Zoom optics TTL Laser long working distance 50mm. TTL Laser AF can work and show a high AF device repeatability, independent from magniﬁcation used. It can also be used Mirror for scanning the surface by detecting a maximum of 1000 points per Objective lens second. TTL Laser AF can detect both top and bottom surfaces of a LED ring transparent layer for measuring thickness of the transparent layer or the illuminator depth to surface of the layer under the transparent layer. Focusing mode Zooming head moves to focus point, passes it and returns to it. Trigger mode Zooming head moves to focus point and passes it and does not return to it (for reduction of measuring time). Zooming head moves to focus point and stops there and does Sample not pass it (for further reduction of measuring time). Tracking mode Searching mode Zooming head detects 2 surfaces reﬂecting laser beam and TTL Laser AF schematic you can choose a surface to detect. 4

Measurement support provided by Vision AF Used for samples difﬁcult to detect with TTL Laser AF, Vision AF is suitable to measure the height of rough surfaces and depth of small/deep holes. Surface mode Contrast mode Multi mode 2 peak detection Focus on surface of objects Focus on edges contoured by the Measure height of multiple points in Obtain higher or lower focus points bottom light the FOV Versatile illumination designed for highlighting obscure edges LED light sources have now replaced all the halogen light sources used on previous 1 models. LEDs have a stable high color temperature, which does not change with intensity. 2 This gives more natural images and shorter measurement times. 34 37° W.D.: 50 mm 55° W.D.: 36 mm 78° W.D.: 10 mm 5 LED inner ring light LED outer ring light LED outer ring light 1 Diascopic and episcopic light control at 55 degree position at 78 degree position 2 Automatic adjustment of diascopic The inner 8 segment LED ring illuminator has 37 degree oblique angle to optical axis and and episcopic light intensity the outer 8 segment LED ring illuminator has 55 and 78 degrees, that can easily deﬁne 3 Ring light control – edges which are almost invisible to coaxial top light. angle and direction 4 Rotation of ring light direction 5 Ring light intensity control 0° (Coaxial top light) 0° (Coaxial top light) Coaxial top light / 37 degree oblique light Coaxial top light / 78 degree oblique light (Connector at optical magniﬁcation 5×) (Drill at optical magniﬁcation 5×) Obscure edges under coaxial top light are visible with LED ring lights. 0° (Coaxial top light) (W.D.: 10 mm) (W.D.: 36 mm) Coaxial top light / 78 degree oblique light / 55 degree oblique light (Drill at optical magniﬁcation 5×) An obscure edge under coaxial top light is visible with oblique lights. 55 degree oblique light with a 36 mm working distance has an effect similar to the 78 degree oblique light with a working distance of 10 mm. 5

Type 4 – High magniﬁcation zooming head Ideal for measuring high density samples with tiny features Type 4 has a 4 to 60× optical Optical magniﬁcation 4 8 16 32 60 magniﬁcation, twice that of Type 3. 1.165 0.582 0.291 0.146 0.078 The objective lens is designed with a FOV size on stage Horizontal × Vertical (mm) 0.875 0.437 0.218 0.109 0.058 high NA of 0.46 and a long working 4.8×3.6 distance of 30mm. 1/3” CCD size Horizontal × Vertical (mm) 144 288 1152 2160 36 Video magniﬁcation 576 Total magniﬁcation on Video Window (640 × 480 pixels) Size of 1 pixel (micrometer) 1.84 0.82 0.46 0.23 0.12 Size of objects on 1.44 2.88 Video Window 0.01× (mm) 14.4 28.8 5.76 11.52 21.6 0.1× (mm) 144 288 57.6 115.2 216 (640 × 480 pixels) 1× (mm) 576 1152 2160 * Total magniﬁcation is that of video window with 640 × 480 pixels on 24 inch WUXGA monitor (1920 × 1200 pixels) recommended for VMZ-R series. 8-segment LED ring illuminator suited for various samples Type 4 is equipped with an 8-segment LED ring illuminator, as well as episcopic and diascopic illuminators, that make obscure edges stand out. Subtle edges can be detected by utilizing the 50 degree oblique angle of the 8-segment ring illuminator. High density PCB 8-segment LED ring light Lead frame Coaxial illumination Episcopic illumination at optical magniﬁcation 4× at optical magniﬁcation 4x 50° W.D.: 30mm 2 types of AF available as standard TTL Laser AF Zoom optics TTL Laser Vision AF Mirror AF device TTL Laser AF, with a working distance Objective lens Sample Vision AF can detect surfaces that cannot of 30mm, can detect both the top and be reached with the Laser AF. The bottom bottom layers of thin samples, such as LED ring surface of deep holes and the height transparent samples of 0.1mm thickness. illuminator of steep surfaces can be detected and By scanning 1000 points per second, measured with Vision AF. the TTL Laser AF not only offers high accuracy, but also speed. TTL Laser AF schematic 6

Type TZ – High magniﬁcation zooming head Type TZ zooming head range 1× to 120× Type TZ high magniﬁcation zooming head is equipped with two objective lenses that can be easily switched, offering a total of 1 to 120x optical magniﬁcations. From low magniﬁcation to high magniﬁcation to measure tiny features, such as 1 micrometer line width, Type Z covers a wide range of measurement area. Optical magniﬁcation 1 2 4 7.5 16 32 64 120 4.7 2.33 1.165 0.622 0.291 0.146 0.073 0.039 FOV size on stage Horizontal × 3.5 1.75 0.875 0.467 0.218 0.109 0.055 0.029 Vertical (mm) 36 72 144 1152 2304 4320 1/3” CCD size Horizontal × 7.36 3.68 1.84 4.8×3.6 0.23 0.11 0.06 Vertical (mm) 0.36 0.72 1.44 36 11.52 23.04 43.2 14.4 115.2 230.4 432 Video magniﬁcation 3.6 7.2 144 270 576 1152 2304 4320 36 72 Total magniﬁcation on Video Window (640 × 480 pixels) Size of 1 pixel (micrometer) 0.98 0.46 2.7 5.76 Size of objects on 0.01× (mm) 27 57.6 Video Window 0.1× (mm) 270 576 1× (mm) (640 × 480 pixels) * Total magniﬁcation is that of video window with 640 × 480 pixels on 24 inch WUXGA monitor (1920 × 1200 pixels) recommended for VMZ-R series. TTL Laser AF highest among the VMZ-R series Type TZ main objective lens has TTL Laser AF built-in. Zoom optics 0.002 High NA (0.55) lens has the highest performance in Left terms of detecting and scanning. objective TTL Laser 0.001 AF device 0 -0.001 Right objective 1.94 1.96 1.98 2 2.02 2.04 2.06 Sample -0.002 Mirror Cross section of a small groove TTL Laser AF schematic CNC controlled illuminations Offers coaxial, episcopic, and darkﬁeld illuminations to detect edges of tiny features. Objective lenses for Type TZ Lead frame Episcopic illumination High density PCB Left: 1 to 7.5× Coaxial illumination Darkﬁeld illumination at optical magniﬁcation 1× at optical magniﬁcation 16× Right: 16 to 120× 7

Type A – Wide FOV zooming head Features a wide FOV and long working distance With a maximum of 13.3 × 10 mm FOV at 0.35×, the wide FOV is available for samples with large features. 13.3mm Optical magniﬁcation 0.35 0.6 1 1.8 3.5 10 yen coin 13.3 7.8 4.7 2.6 1.33 FOV size on stage Horizontal × 10.0 5.8 3.5 1.9 1.00 Under coaxial top light Vertical (mm) at 0.35× optical magniﬁcation 12.6 126 1/3” CCD size Horizontal × 21.8 4.8×3.6 2.15 At all magniﬁcations, a working distance of 73.5 mm Vertical (mm) 0.126 1.26 can be realized. Type A is suitable for measuring low 1.26 12.6 density samples with wide steps and/or deep holes. 12.6 126 Video magniﬁcation 36 Total magniﬁcation on 21.6 36 64.8 Video Window (640 × 480 pixels) Size of 1 pixel (micrometer) 12.6 7.36 4.25 0.216 0.36 0.648 Size of objects on 0.01× (mm) Video Window 0.1× (mm) 2.16 3.6 6.48 1× (mm) 21.6 36 64.8 (640 × 480 pixels) * Total magniﬁcation is that of video window with 640 × 480 pixels on 24 inch Working distance Assembled components WUXGA monitor (1920 × 1200 pixels) recommended for VMZ-R series. 73.5 mm Under coaxial top light at 0.35× optical magniﬁcation Vision AF and Laser AF The search probe can detect misaligned parts, and rotate the program to suit, allowing for successful measurement with the Vision AF. With a 63 mm working distance, the Laser AF option for Type A offers high accuracy, independent of magnification and its depth of focus. Focusing on a surface Focusing on an edge Working distance (Vision AF Surface mode) (Vision AF Contrast mode) 63 mm (Laser AF) Illumination lineup for various needs 8-segment LED ring light Equipped with episcopic, diascopic and 8-segment ring illuminators. Obscure edges can be visualized by using the 8-segment ring illuminator with an oblique angle of 18 degrees. Plastic molded part Episcopic illumination Under coaxial top light at 0.35× optical magniﬁcation 8

Software Digital Operation Guide NEXIV Note Ver.1.0 Edge and point selection Offers slides and movies with NEXIV contents, such as Preset rules for selecting basic operations and fuctions. Simple measurement the correct edge with programs can be created by referring to this application. multiple edge candidates and a ﬁlter to avoid abnormal points to minimize errors. Intelligent search function Measures by searching preset shapes/patterns. Misaligned samples can be found and measured without failure. Content Example Automatically ﬁnds the shape that was preset Search: search by related words Favorite: list only selected contents \"Rotate search\" detects the misaligned samples and automatically Memo: share information by creating memos rotates the program to suit for measurement. Pack List: sort by related contents Stay on top: display in the foreground on screen Evaluation of shapes Favorite Stay on top Errors can be visualized by overlaying nominal and Pack list Search measured shapes. Can be used for both geometrical shapes and free-form shapes. Memo Calculation of errors can be made in normal or axis direction Other functions Nominal shapes can be made from CAD data or XYZ coordinate values Import of CAD data Measured shapes can be output as CSV or DXF ﬁles Evaluation reports can be made in PDF ﬁles CAD data can be imported and shown in the graphic window. Export of DXF data Features measured can be exported as DXF data. Off-line teaching Teaching ﬁles can be made on CAD data. Reporting measured data Easily made by choosing graphics and layouts. Calculations based on ISO and JIS standards Circle (roundness), plane (ﬂatness), line (straightness) are available. 9

Optional Software EDF/Stitching Express ImageFit QC Images taken with the VMZ-R can be stitched to get a larger Creates inspection reports according to any designated image, while images at different heights can result with an format. Measurement results can be automatically reﬂected image with Extended Depth of Focus (EDF). Stitching and EDF with pass/fail results and statistical results*. Line graphs and can produce 3D graphics. histograms can also be created as needed. *standard deviation, process capability index (Cp, Cpk) *Excel is required Codeveloped by Aria Co., Ltd. (Japan) Original image 3D graphic from EDF Parameter Settings Report of Measurement Results Original image Cross section from EDF and Stitching MountainsMap X Custom Fit QC Sample surfaces can be analyzed, based on ISO, with the Measurement results are read into 10 different templates and data exported from VMZ-R. pass/fail results and calculation results*1 are automatically exported. Graphs*2, including X-R control charts and scatter Manufactured by Digital Surf (France) diagrams, can be automatically generated to visualize measurement results. Pseudo-color view of the surface 3D view of the surface *1: Average, maximum value, minimum value, range, standard deviation, and process capability index (Cp, Cpk) *2: Line graphs, histograms, X-R control charts, scatter diagrams *Excel is required Codeveloped by Aria Co., Ltd. (Japan) Proﬁle curve Pseudo-color view of the surface MapMeasure Pro Roughness curve MapMeasure Pro creates wafer maps and is capable of automatically measuring any die on the wafer map. Tray maps can also be created. 10

Dimensions Controller: 190×450×440 mm / 15 kg VMZ-R 3020 270 45 420 15 20-M6 depth 10 60 60 60 60 60 60 60 1285 300 28 60 60 60 60 60 200 (Y stroke) 78 230 (Glass surface) 63 Measuring range 356 1795 450 28 78 825 63 315 105 300 (X stroke) 75 510 68 355 (Glass surface) 57 480 700 190 730 Main body with table: 700×730×1795 mm / approx. 245 kg Footprint including a PC on table: 2100×1100 mm VMZ-R 4540 1000 38 100 100 100 100 100 38 656 270 20 626 20 89.5 30 8 Measuring range 1820 400 (Y stroke) 215 580 (Glass surface) 1340 610 850 90.5 491 450 16 63 450 (X stroke) 63 8 576 (Glass surface) 830 190 170 1000 170 920 1340 12-M8 depth 20 Main body with table: 1000×1340×1820 mm / approx. 500 kg Footprint including a PC on table: 2300×1700 mm VMZ-R 6555 20 776 20 88 100 100 100 100 100 100 88 89.5 Measuring range 8 1200 856 270 1820 550 (Y stroke) 215 730 (Glass surface) 760 1340 850 450 90.5 479 8 1000 190 255 1125 260 63 650 (X stroke) 63 1120 1640 776 (Glass surface) 14-M8 depth 20 Main body with table: 1200×1640×1820 mm / approx. 665 kg Footprint including a PC on table: 2400×2000 mm 11

Speciﬁcations Model VMZ-R 3020 VMZ-R 4540 VMZ-R 6555 XYZ strokes 300×200×200 mm 450×400×200 mm 650×550×200 mm Type 1, 2, 3 and 4 Type TZ with high magniﬁcation lens 300×200×200 mm 450×400×200 mm 650×550×200 mm Type TZ with low magniﬁcation lens 250×200×200 mm 400×400×200 mm 600×550×200 mm Type A Minimum readout 300×200×200 mm 450×400×200 mm 650×550×200 mm Maximum sample weight M(La:xLimenugmthpienrmmimss)ible error 0.01 micrometer Camera 20 kg 40 kg 50 kg Working distance of objective lens EUX, MPE EUY, MPE: 1.2+4L/1000 µm Type 1, 2 and 3 EUXY, MPE: 2+4L/1000 µm Type 4 EUZ, MPE: 1.2+5L/1000 µm 1/3“ Black and White CCD, 1/3“ Color CCD *Color camera option is available only with Type 1, 2 and A Type TZ Type A 50 mm with 37 degree oblique angle, 36 mm with 55 degree oblique angle, 10 mm with 78 degree oblique angle Magniﬁcation and FOV 30 mm Autofocus 11 mm with right objective lens, 32 mm with left objective lens Illumination 73.5 mm (63 mm with Laser AF) Type 1, 2, 3, and 4 Type TZ Type 1: 0.5~7.5× / 9.33 × 7 ~ 0.622 × 0.467 mm Type 2: 1~15× / 4.67 × 3.5 ~ 0.311 × 0.233 mm Type A Type 3: 2~30× / 2.33 × 1.75 ~ 0.155 × 0.117 mm Type 4: 4~60× / 1.165 × 0.875 ~ 0.078 × 0.058 mm Type TZ: 1~120× / 4.67 × 3.5 ~ 0.039 × 0.029 mm Type A: 0.35~3.5× / 13.3 × 10 ~ 1.33 × 1 mm Power source Vision AF, Laser AF (option) Power consumption Episcopic, diascopic, and 8-segment ring with 3 angles *All white LED/Type 4 has only 1 angle Left objective lens: Episcopic, darkﬁeld ; Right objective lens: Episcopic, diascopic, darkﬁeld Episcopic, diascopic, and 8-segment ring with 1 angle *All white LED AC 100-240V±10% 50/60 Hz 5 A - 2.5 A Nikon Corporation Industrial Metrology Business Unit is certiﬁed as Date of initial accreditation: July 1, 2009 an ISO/IEC 17025 accredited calibration laboratory for CNC video Scope of accreditation: Coordinate measuring instruments measuring systems by the IAJapan (International Accreditation Accredited section: Industrial Metrology Business Unit Japan) as Accreditation No.JCSS0241. Calibration site: Customer’s laboratory (ﬁeld service) Calibration and Measurement ISO/IEC 17025: International standard, which speciﬁes the general Capability (CMC), (K=2, Level of L ≤ 420mm: 0.32 µm requirements to ensure that a laboratory is competent to carry out Conﬁdence Approximately 95%) 420 ≤ L ≤ 1000mm : (0.29 + 0.64 × L/1000) µm speciﬁc tests and/or calibrations [L=measurement length (mm)] Speciﬁcations and equipment are subject to change without any notice or obligation on the part of the manufacturer. March 2020 ©2013-2020 NIKON CORPORATION N.B. Export of the products* in this catalog is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedures shall be required in case of export from Japan. *Products: Hardware and its technical information (including software) Company names and product names appearing in this brochure are their registered trademarks or trademarks. NIKON CORPORATION ISO 14001 Certiﬁed Shinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, Japan for NIKON CORPORATION phone: +81-3-6433-3701 fax: +81-3-6433-3784 https://www.nikon.com/products/industrial-metrology/ ISO 9001 Certiﬁed for NIKON CORPORATION Industrial Metrology Business Unit NIKON METROLOGY EUROPE NV NIKON METROLOGY, INC. NIKON MALAYSIA SDN BHD Geldenaaksebaan 329, 3001 Leuven, Belgium 12701 Grand River Avenue, Brighton, MI 48116 U.S.A. MALAYSIA phone: +60-3-7809-3688 fax: +60-3-7809-3633 phone: +32-16-74-01-00 fax: +32-16-74-01-03 phone: +1-810-220-4360 fax: +1-810-220-4300 PT. NIKON INDONESIA E-mail: [email protected] E-mail: [email protected] INDONESIA phone: +62-267-864-3949 fax: +62-267-864-3950 http://www.nikonmetrology.com/en-gb http://www.nikonmetrology.com/en-us E-mail: [email protected] NIKON METROLOGY UK LTD. NIKON CANADA INC. UNITED KINGDOM phone: +44-1332-811-349 fax: +44-1332-639-881 CANADA phone: +1-905-602-9676 fax: +1-905-602-9953 NIKON SALES (THAILAND) CO., LTD. THAILAND phone: +66-2633-5100 fax: 66-2633-5191 E-mail: [email protected] NIKON MEXICO- Metrology Showroom MEXICO phone: +52 (442) 688 5067 NIKON INDIA PRIVATE LIMITED NIKON METROLOGY SARL INDIA phone: +91-124-4688500 fax: +91-124-4688527 FRANCE phone: +33-1-60-86-09-76 fax: +33-1-60-86-57-35 E-mail: [email protected] E-mail: [email protected] NIKON INSTRUMENTS (SHANGHAI) CO., LTD. CHINA (Shanghai branch) phone: +86-21-6841-2050 fax: +86-21-6841-2060 NIKON METROLOGY GMBH (Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026 GERMANY phone: +49-6023-91733-0 fax: +49-6023-91733-229 (Guangzhou branch) phone: +86-20-3882-0551 fax: +86-20-3882-0580 E-mail: [email protected] NIKON INSTRUMENTS KOREA CO., LTD. KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415 NIKON INSTRUMENTS S.p.A. ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93 NIKON SINGAPORE PTE LTD. SINGAPORE phone: +65-6559-3651 fax: +65-6559-3668 Printed in Japan (2003) Am/M E-mail: [email protected] Code No. 2CE-IHCH-8

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Nikon VMA & VMR Series VMM

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Nikon VMA & VMR Series VMM

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