Nikon Microscope Range

Universal Table Stands/Focusing Mounts Universal Table Stand US-3 Universal Table Stands G-US1A/G-US2 Not only can it be used for a large sample, but this extremely stable stand also easily accommodates intermediate tubes. These stands are handy in microscopy with large samples not loaded onto the standard stand. The microscope zooming body is - Used in conjunction with the C-FMAN Focusing Mount AN on the SMZ1270/ mounted to the stand arm via a focusing mount. The G-US1A is a 1270i/800N/745/745T/445/460. table clamp type (table top thickness: 3 to 53 mm). - Used in conjunction with the SM Focusing Mount on the SMZ-2. - Used in conjunction with the C-FMBN Focusing Mount BN on the SMZ1270/1270i/800N/SMZ745/745T/445/460. Universal Table Stand US-3 - Used in conjunction with the SM Focusing Mount and the G-USA SM US Adapter on the SMZ-2. - Cannot be used with the SMZ1270/1270i/800N when intermediate tube is mounted on these models. G-US1A Universal Table Stand 1 Can be installed on the top Unit: mm or bottom edge. Specifications Universal Table Stand G-US2 Universal Table Stand 2 Model G-US1A G-US2 US-3 Vertical cross travel 229mm Horizontal cross travel 253mm 254mm 272mm Weight (approx.) 30.5kg C-FMAN Focusing Mount AN 260mm C-FMBN Focusing Mount BN ○ C-FMCN Focusing Mount CN 4.4kg 23.0kg — SM Focusing Mount — ○: Possible * G-USA Adapter is required — ○ G-USA Adapter ○ — ○* Unit: mm The image is a configuration sample with the SM Focusing Mount. Focusing Mounts Various types of focusing mounts are available depending on use. They are used to incorporate stereo microscope bodies into IC bonders or other devices (SM Focusing Mount is for SMZ-2). These mounts can also be used when attaching microscopes to Universal Table Stands. C-FMAN Focusing Mount AN C-FMBN Focusing Mount BN C-FMCN Focusing Mount CN SM Focusing Mount ø76mm: C-FMAN Focusing Mount AN Unit: mm ø62mm: SM Focusing Mount 23 C-FMAN Focusing Mount AN C-FMBN Focusing Mount BN C-FMCN Focusing Mount CN SM Focusing Mount 40mm Focusing area 40mm 50mm 50mm 0.6kg － Weight (approx.) 0.6kg 0.8kg 1.6kg SMZ-2 Antistatic function 〇 〇 － Compatible microscopes SMZ1270/1270i/800N/745/745T/445/460

System Diagrams (SMZ25/SMZ18) Digital DS-Fi3 DS-Ri2/Qi2 Sight 1/1.8\" C-W10xB C-W15x C-W20x C-W30x 1000 Camera 2/3” Camera C-mount CCD Camera Eyepiece Eyepiece Eyepiece Eyepiece C-0.7x DXM C-DA C-mount Relay Lens Adapter C-0.55x DS DS-F 2.5 DS-F Relay Lens F-mount F-mount Adapter 2.5x Adapter LV-TV A TV Adapter A AA AZ-PCR Photo Release P2-TERG100 P2-TERG50 P2-TL100 P2-RC Trinocular Tilting Tube Trinocular Tilting Tube Trinocular Tube L Remote AZ-FSW Controller Foot Switch C-HGFI/C-HGFIE HG Precentered Fiber Illuminator P2-EFLM Motorized Epi Fluorescence Attachment X (with Light Shading Plate) P2-EFL Filter Cube (GFP-B/GFP-L /RFP) P2-EFLI P2-EFLC X Y Epi Fluorescence Filter Cube P2-CTLA Attachment P2-EFLBF Control Box X (with Light Shading Plate) Filter Cube (Brightfield) SU-AC AC Adapter D Power cable P2-CI P2-MFU Coaxial Epi Motorized Focus Unit Illuminator P2-FM Focus Mount Adapter B WX CX X P2-RNI2 V X P2-RLY Intelligent Nosepiece Relay Box SMZ18 SMZ25 Zooming body Zooming body Y V P2-CTLB P2-FU Control Box Focus Unit P2-SHR Plan P2-SHR Plan P2-SHR Plan P2-SHR Plan BW Apo 0.5x Objective Apo 1x Objective Apo 1.6x Objective Apo 2x Objective P2-RLYC P2-CIA QL Relay Cable 0.5x 1/4 P2-CIA QL Plate 1x 1/4 Plate D P2-FIRL2 P2-POL P2-FIR Z AC Adapter 3 Power cable LED Ring Simple Polarizing Ring Fiber Illumination Unit Illumination Attachment Unit J C-FDF Flexible Double Arm Z Fiber Illumination Unit Power cable AC Adapter 3 P-DF2 C-FIDH LED Darkfield Unit Fiber Holder G Stage Adapters Z C-FLED2 for AZ C-SSL G LED Light Source for Fiber Illuminator DIA Sliding Stage P2-DBF Shading Fiber Diascopic C P2-FMDN cover Illumination Base Focus Mount V C-TRS Tilting Stage P-SXY64 C-EP Extension Pillar XY Stage H I B HI J HI HI HI J G G G G D P2-DBL LED Diascopic P2-PB Illumination Base P-PS32 HI J Plain Base Y AC Adapter 3 Plain Stand Power cable G P-DSF32 Fiber Diascopic Illumination Stand P-DSL32 LED Diascopic Illumination Stand AC Adapter 3 Power cable 24

Specifications/Dimensions (SMZ25/SMZ18) Specifications SMZ25 SMZ18 Zooming body Parallel-optics type (zooming type), apochromatic optical system Manual Optical system Motorized 18:1 Zoom 25:1 0.75-13.5x (with 0.75/1/2/3/4/5/6/8/10/12/13.5x click stops) Zoom ratio 0.63-15.75x Zoom range Zooming body built-in Aperture diaphragm 0.312, 20 (with a correction ring for water 0 to 3 mm in depth) 0.3, 20 (with a correction ring for water 0 to 3 mm in depth) Objectives NA, WD (mm) 0.25, 30 0.24, 30 P2-SHR Plan Apo 2x 0.156, 60 0.15, 60 P2-SHR Plan Apo 1.6x 0.078, 71 0.075, 71 P2-SHR Plan Apo 1x P2-SHR Plan Apo 0.5x 3.15-315x (depending on objective used) 3.75-270x (depending on objective used) Total Magnification • C-W10xB (22) • C-W 15x (16) • C-W 20x (12.5) • C-W 30x (7) (using C-W10xB eyepieces) Eyepieces (F.O.V. mm) • P2-TERG 100 Trinocular Tilting Tube (100/0 : 0/100) • P2-TERG 50 Trinocular Tilting Tube (100/0 : 50/50) Inclination angle : 0-30 degree Tubes (eyepiece/port) • P2-TL100 Trinocular Tube L (100/0 : 0/100) Inclination angle : 15 degree Focusing Unit (stroke from objective’s parfocal point) • P2-MFU Motorized Focus Unit (up 96 mm/down 4 mm) Focus mount adapter/nosepiece • P2-FU Focus Unit (up 97 mm/down 5 mm) Bases/stand • P2-FM Focus Mount Adapter • P2-FM Focus Mount Adapter • P2-RNI2 Intelligent Nosepiece (2 objectives can be attached) • P2-RNI2 Intelligent Nosepiece (2 objectives can be attached) Stages • P2-FMDN Focus Mount (for P-PS32/P-DSL32/P-DSF32 stands) Observation methods • P2-PB Plain Base • P2-DBL LED Diascopic Illumination Base (OCC illuminator built-in) • P2-DBF Fiber Diascopic Illumination Base Epi-fluorescence attachments Epi-fluorescence light sources • P-PS32 Plain Stand (only for SMZ18) • P-DSL32 LED Diascopic Illumination Stand (OCC illuminator built in) (only for SMZ18) Episcopic illuminators • P-DSF32 Fiber Diascopic Illumination Stand (only for SMZ18) Episcopic light source • P-SXY64 Stage • C-SSL DIA Sliding Stage • C-TRS Tilting Stage Weight (approx.) Brightfield, Epi Fluorescence, Simple Polarizing (with P2-POL Simple Polarizing Attachment), Darkfield (with P-DF2 LED Darkfield Unit), Oblique Lighting Power consumption (approx.) 4 filter cubes mountable, fly-eye lens built-in • P2-EFLM Motorized Epi Fluorescence Attachment • P2-EFLI Epi Fluorescence Attachment • HG Precentered Fiber Illuminator Intensilight C-HGFIE HG/C-HGFI HG (130W) • P2-FIRL2 LED Ring Illumination Unit Use with fiber light source • P2-CI Coaxial Epi Illuminator • P2-FIR Ring Fiber Illumination Unit • C-FDF Flexible Double Arm Fiber Illumination Unit • C-FLED2 LED Light Source for fiber illuminator 32 kg 30 kg (Motorized Epi Fluorescence Attachment configuration with (Epi Fluorescence Attachment configuration with Trinocular Trinocular Tilting Tube, Motorized Focus Unit, Intelligent Nosepiece, Tilting Tube, Focus Unit, Intelligent Nosepiece, LED DIA Base and LED DIA Base and Objectives 1x and 0.5x) Objectives 1x and 0.5x) 30W 10W (Motorized Epi Fluorescence Attachment configuration with Trinocular (Epi Fluorescence Attachment configuration with Trinocular Tilting Tilting Tube, Motorized Focus Unit, Intelligent Nosepiece and LED Tube, Focus Unit, Intelligent Nosepiece and LED DIA Base) DIA Base) Dimensions (configured with epi-fluorescence (configured with plain stand and attachment and LED DIA base) focus mount) (configured with motorized epi-fluorescence attachment and LED DIA base) 514 25471 569 298 471 569 298 429 300 492 514 25 302 337 (44) 244 444 444 Unit: mm 25

System Diagrams (SMZ1270/1270i, SMZ800N, SMZ745/745T) SMZ1270/1270i/800N SMZ800N SMZ1270 C Zooming Body Zooming Body A SMZ1270i B D Zooming Body BB D D P-TERG100 P-TERG50 P-T100 P-B P-RN2 Nosepiece Trinocular Trinocular Trinocular Tube Binocular Tube Tilting Tube Tilting Tube P-RNI2 Intelligent Nosepiece Achro ED Plan Plan 0.5x 0.75x 1x Plan Apo Plan Apo Plan Apo ED Plan ED Plan 0.5x / WF 0.75x / WF 1x / WF 1.5x / WF 2x / WF Tubes with the symbol cannot be used in combination with stands with the symbol (p. 27). E SMZ745/745T C-mount Camera A SMZ745 SMZ745T G-ICIL LED Auxiliary objectives Zooming Body Zooming Body Coaxial Episcopic G-AL 0.29x G-AL 0.5x G-AL 0.7x G-AL 1.5x G-AL 2x D Illuminator D Power cable E Eyepieces/Camera Adapters C-mount Camera Rubber Rubber Horn-shaped Eyepieces C-0.55x DS C-0.7x DXM C-DA Eyeguard Eyeguard 25 Rubber Eyeguard C-W20x C-W30x Relay Lens Relay Lens C-mount Adapter C-W10xB C-W15x LV-TV Tube Adapter C-FC Reticle C-FM Reticle A B (Crosshairs) (Micrometer) Intermediate Tubes B HG Precentered Fiber Illuminator \"Intensilight\" Filter cubes P-IER Eye-level Riser P-IBSS2 Beam Splitter S2 P-EFL GFP-B P-EFL Epi GFP-L Filter Cube Fluorescense P-EFLC Filter Cube Attachment P-EFLBF Filter Cube (Bright eld) P-CL QL1x 1/4λ Plate P-CL QL1.5x 1/4λ Plate P-THSS Teaching Head P-IDT Drawing Tube F Y-THPL LED Pointer Unit for Teaching Head TH-AC2 AC Adapter for TH Pointer P-CI Coaxial Epi Illuminator Power Cable P-THS Teaching Head Stand Iris Diaphragm C P-CI QL1x 1/4λ Plate P-CI QL1.5x 1/4λ Plate Epi uorescense attachments with the symbol cannot be used in combination with stands with the symbol (p. 27). 26

Illuminators C-FID2 Double Arm Fiber Illuminator C-LSL2 LED C-FDF Flexible Double Arm Fiber Epi Illuminator Illumination Unit G-EIA Flexible Supporting Arm SMZ-U AC Adapter 3 Articulated Power Cable Arm C-FLED2 LED AC Adapter 3 Light Source for Power Cable Fiber Illuminator P-DF-LSP Light C-FIDH Fiber Holder Shielding Plate E C-POL Polarizing C-FIR Plastic Fiber-optics P-DF2 LED Attachment Ring Illuminator Dark eld Unit C-LP 1/4λ Plate F Stands/Stages D C-ER Extension Ring Adapter for Achro 0.5x Objective C-PSN Plain Stand/CN, C-LEDS Hybrid LED Stand C-DS Diascopic C-DSLU2 LED Unit for Stand S Dia Illumination Stand C-PSCN Compact Stand/CN Power Cable C-FMAN Focusing C-FMCN Mount AN Focusing Mount CN C-FMBN C-EP Extension Pillar Focusing Mount BN (SMZ1270/1270i/800N: used with auxiliary objectives 0.5x, 0.7x SMZ745/745T: used with auxiliary objectives 0.5x, 0.7x) F Universal Table Stand US-3 G-US1A Universal G-US2 Universal P-PS32 Plain Stand P-DSL32 LED Diascopic P-DSF32 Fiber Diascopic Table Stand 1 Table Stand 2 Illumination Stand Illumination Stand AC Adapter 3 SM Opal & Black SMZ C-ASP 180 / C-GSP 180 / Power Cable Stage Adapters for AZ Acrylic Plate Glass Plate C-ASP2 177 C-GSP2 177 ESD Plate Acrylic Plate Glass Plate Circular Floating Stage 2* C-TRS Tilting * Cannot be used C-SSL DIA P-SXY Stage Sliding Stage XY Stage for diascopic Stands with the symbol cannot be used in combination with tubes and observation. epi uorescense attachments with the symbol (p. 26). 27

Specifications Parallel-optics type Model SMZ25 SMZ18 Optical system Parallel-optics type (zooming type) Zoom ratio 25:1 18:1 Zoom range 0.63-15.75x 0.75-13.5x Total magnification* (When coaxial 3.15-945x (12.5-472x) 3.75-810x (19-405x) episcopic illuminator is attached) Tubes P2-TERG 100 Trinocular Tilting Tube, P2-TERG 50 Trinocular Tilting Tube, P2-TL100 Trinocular Tube L Eyepiece inclination P2-TERG 100/50: 0°-30°, P2-TL100: 15° Interpupillary distance P2-TERG 100/50: 50 mm or wider adjustment P2-TL100: 50–75mm Eyepieces C-W10xB (F.N. 22), C-W15x (F.N. 16), C-W20x (F.N. 12.5), C-W30x (F.N. 7) (with diopter adjustment) Objectives P2-SHR Plan Apo 0.5x, P2-SHR Plan Apo 1x, P2-SHR Plan Apo 1.6x, P2-SHR Plan Apo 2x Working distance (with standard 60 mm 10 kg (with Plain Stand and Ring LED set) configuration or 1x objective) 32 kg Weight (approx.) (motorized Epi Fluorescence Attachment configuration) * Depending on eyepiece and objective used Greenough type Model SMZ745/745T SMZ445 Optical system Greenough type (zooming type) Zoom ratio Greenough type (zooming type) 4.4 : 1 Trinocular Tube (SMZ745T) 0.8–3.5x 4–70x 7.5 : 1 Fixed 45° Zoom range 0.67–5x 54–75mm Total magnification* 3.35–300x Tubes Fixed (binocular tube: SMZ745, trinocular tube: SMZ745T) Eyepiece inclination 45° Interpupillary distance 52–75mm adjustment Eyepieces C-W10xB (F.N. 22), C-W15x (F.N. 16), C-W20x (F.N. 12.5), C-W30x (F.N. 7) SM 10xB (F.N. 21), SM 15xB (F.N. 14), SM 20xB (F.N. 12) (with diopter adjustment) Objectives — — Auxiliary objectives G-AL 0.5x (W.D. 211mm), 0.7x (W.D. 150mm), 1.5x (W.D. 61mm), SM-AL 0.5x, 0.7x 2x (W.D. 43.5mm) Working distance (with standard 115mm 100mm configuration or 1x objective) Weight (approx.) 1.6kg (SMZ745 body) 1.0kg (body) 1.8kg (SMZ745T body) * Depending on eyepiece and objective used 28

SMZ1270 SMZ1270i SMZ800N Parallel-optics type (zooming type) 12.7:1 8:1 0.63 – 8x 1 – 8x 3.15 – 480x (depending on eyepiece and objectives) 5 – 480x (depending on eyepiece and objectives) (with coaxial episcopic illuminator: 15 – 540x) (coaxial episcopic illuminator: 22.5 – 540x) P-B Binocular Tube, P-T100 Trinocular Tube, P-TERG 100 Trinocular Tilting Tube, P-TERG 50 Trinocular Tilting Tube P-B: 20° P-T100: 10° P-TERG100/50: 0°-30° P-B: 48–75mm P-TERG100/50: 50 mm or wider C-W10xB (F.N. 22), C-W15x (F.N. 16), C-W20x (F.N. 12.5), C-W30x (F.N. 7) (with diopter adjustment) Plan Apo 0.5x/WF, Plan Apo 0.75x/WF, Plan Apo 1x/WF, Plan Apo 0.5x/WF, Plan Apo 0.75x/WF, Plan Apo 1x/WF, ED Plan 1.5x/WF, ED Plan 2x/WF ED Plan 1.5x/WF, ED Plan 2x/WF, Plan 1x, ED Plan 0.75x, Achro 0.5x 70 mm 78 mm 9.8 kg (with Binocular Tube + LED 11.9 kg (with Trinocular Tilting Tube + 6.8 kg (with Binocular Tube + Plain Stand) Diascopic Illumination Stand) LED Diascopic Illumination Stand) SMZ460 SMZ-2 Greenough type (zooming type) 4.3 : 1 5:1 0.7–3x 0.8–4x 3.5–60x 4.8–120x Fixed 60° 45° 54–75mm 56–75mm SM E10xA (F.N. 23, standard), SM 15xB (F.N. 14), SM 20xB (F.N. 12), SM 10xB (F.N. 21), SM 15xB (F.N. 14), SM 20xB (F.N. 12) C-W30x (F.N. 7) — 0.8-4x AL5 (0.6x, W.D. 103mm), AL7 (0.8x, W.D. 95mm) SM-AL 0.5x (W.D. 181mm), 0.7x (W.D. 127.5mm) 100mm 77.5mm 1.1kg (body) 1.6kg (body), 1.9kg (Stand) 29

Related Products Camera Head Microscope Camera Microscope Camera Microscope Camera Microscope Camera 2.0-megapixel Color 16.25-megapixel Color High-resolution 16.25-megapixel Monochrome Cooled 5.9-megapixel Color High-resolution Enables a wide range of advanced digital imaging capabilities using a desktop PC and tablet PC. Using a desktop PC Using a tablet PC EDF（Extended Depth of Focus） Simply installing NIS-Elements L on a tablet PC enables setting and control of DS-Fi3/ Captures multiple high-resolution images at different focal depths to create a DS-Ri2 microscope cameras, live image single extended depth of focus image or quasi-3D image. display, and image acquisition. Note: N IS-L is available only for Digital Sight Select the in-focus area and produce one all-in-focus image 1000, DS-Fi3, and DS-Ri2 Multichannel (multicolor) A wide variety of tools Multiple fluorescent channels can be captured in conjunction with other imaging NIS-Elements L enables the conducting of simple measurements on images, with input methods, such as OCC or brightfield. of lines and comments. These can also be written onto and saved with the image, and measurement data can be output. Images captured in single colors Measurement function Length= 6168.28 μm Overlapping image with all colors Line distance Individual cells resolved in a live drosophila embryo expressing GFP Area and mCherry Circle (Using SHR Plan Apo 2x at zoom magnification of 8x with SMZ25) Circle disance Image courtesy of Max V. Staller, Ph.D., Clarissa Scholes, and Angela DePace, Ph.D., Pitch distance Harvard Medical School Angle 30 Annotate function Line Arrow Text Marker Polyline Graticule/scale function Grid Horizontal scale Crosshairs Vertical scale Simple crosshairs Circle

Optical Systems Parallel-optics type Greenough type Parallel-optics type Eyepieces Microscope Eyepieces (zooming type) camera Prisms This system has a parallel optical path Prisms Objectives into which various intermediate tubes, including a beam splitter, coaxial Zooming mechanism episcopic illuminator, epi-fluorescence Objectives attachment, teaching head, drawing tube and eye-level riser, can be inserted. Greenough type (zooming type) Allows a compact body that is suited for incorporation into other devices. 31

N.B. Export of the products* in this catalog is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedure shall be required in case of export from Japan. *Products: Hardware and its technical information (including software) Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. June 2020 ©2007-20 NIKON CORPORATION WARNING TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT. NIKON CORPORATION ISO 14001 Certified for NIKON CORPORATION Shinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, Japan ISO 9001 Certified Healthcare Business Unit, phone: +81-3-6433-3705 fax: +81-3-6433-3785 for NIKON CORPORATION https://www.healthcare.nikon.com/ Industrial Metrology Business Unit Industrial Metrology Business Unit, phone: +81-3-6433-3701 fax: +81-3-6433-3784 https://www.nikon.com/products/industrial-metrology/ http://www.nikonmetrology.com/ NIKON INSTRUMENTS INC. NIKON INSTRUMENTS KOREA CO., LTD. NIKON METROLOGY UK LTD. 1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A. KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415 UNITED KINGDOM: phone: +44-1332-811-349 fax: +44-1332-639-881 phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A. only) NIKON SINGAPORE PTE LTD E-mail: [email protected] fax: +1-631-547-0306 SINGAPORE phone: +65-6559-3651 fax: +65-6559-3668 NIKON FRANCE S.A.S. https://www.microscope.healthcare.nikon.com/ NIKON MALAYSIA SDN BHD FRANCE phone: +33-1-4516-45-16 fax: +33-1-4516-45-55 NIKON METROLOGY, INC. MALAYSIA phone: +60-3-7809-3688 fax: +60-3-7809-3633 NIKON METROLOGY SARL 12701 Grand River Avenue, Brighton, MI 48116 U.S.A. PT. NIKON INDONESIA FRANCE phone: +33-1-60-86-09-76 fax: +33-1-60-86-57-35 phone: +1-810-220-4360 fax: +1-810-220-4300 INDONESIA phone: +62-267-8643949 fax: +62-267-8643950 E-mail: [email protected] E-mail: [email protected] NIKON SALES (THAILAND) CO., LTD. NIKON GMBH http://www.nikonmetrology.com/en-us THAILAND phone: +66-2633-5100 fax: 66-2633-5191 GERMANY phone: +49-211-941-42-20 fax:+49-211-941-43-22 NIKON INSTRUMENTS EUROPE B.V. NIKON INDIA PRIVATE LIMITED NIKON METROLOGY GMBH Tripolis 100, Burgerweeshuispad 101, 1076 ER Amsterdam, The Netherlands INDIA phone: +91-124-4688500 fax: +91-124-4688527 GERMANY phone: +49-6023-91733-0 fax: +49-6023-91733-229 phone: +31-20-7099-000 fax: +31-20-7099-298 NIKON MEXICO- Metrology Showroom E-mail: [email protected] https://www.microscope.healthcare.nikon.com/en_EU/ MEXICO phone: +52-442-688-5067 NIKON METROLOGY EUROPE NV E-mail: [email protected] Geldenaaksebaan 329, 3001 Leuven, Belgium NIKON CANADA INC. phone: +32-16-74-01-00 fax: +32-16-74-01-03 CANADA phone: +1-905-602-9676 fax: +1-905-602-9953 E-mail: [email protected] NIKON INSTRUMENTS S.p.A. http://www.nikonmetrology.com/en-gb ITALY phone: +39-55-300-96-01 fax: +39-55-30-09-93 NIKON INSTRUMENTS (SHANGHAI) CO., LTD. NIKON GMBH SWITZERLAND CHINA phone: +86-21-6841-2050 fax: +86-21-6841-2060 SWITZERLAND phone: +41-43-277-28-67 fax: +41-43-277-28-61 (Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026 NIKON CEE GMBH (Guangzhou branch) phone: +86-20-3882-0550 fax: +86-20-3882-0580 AUSTRIA phone: +43-1-972-6111 fax: +43-1-972-611-140 NIKON UK LTD. UNITED KINGDOM: phone: +44-208-247-1717 fax: +44-208-541-4584 Printed in Japan (2006)T Code No. 2CE-ENAH-7 This brochure is printed on recycled paper made from 40% used material. En

Industrial Microscopes LV150N/LV150NL/LV150NA/LV100ND/LV100NDA Industrial Microscopes

Together with new optics, ECLIPSE is evolving to the next stage. Modularized to meet industrial microscope applications in diverse fields of industry, including semiconductor devices, packaging, FPDs, electronic components, materials, and precision molds. The ECLIPSE LV Series continues to evolve while offering various stand and illumination units selectable according to the observation method and purpose. Four types – motorized and manual types plus dedicated reflected illumination and combined reflected/ transmitted illumination types – are available to meet any application. Expanded lineup Added a compact LED illuminator to the existing lineup. With the use of LED, Nikon illuminators are power saving and achieve long life. Evolved optical performance Nikon's CFI60 optical system, highly evaluated for its unique concept of high NA combined with long working distance has further evolved to achieve the apex in long working distance, chromatic aberration correction, and light weight. Combination with digital camera Detection of microscope information, including objective lens information, and motorized unit microscope operation are now possible using imaging software, for more efficient observation and image capture. Diverse observation / optical contrast methods Combinations of a full range of accessories expand the observation methods available when using transmitted illumination, allowing adaptability to a greater diversity of samples. All models enable brightfield, darkfield, differential interference, fluorescence, polarizing, and two-beam interferometry observation, while the LV100ND and LV100NDA also allow transmission-type differential interference, darkfield, polarizing, and phase contrast observation. 2

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Model features Dedicated reflected illumination models Microscope Manual type Motorized type type Compatible (Nosepiece) observation methods Brightfield Darkfield DIC Fluorescence Polarizing Two-beam Compatible Interferometry stages LV150/ Episcopic LV150NA Episcopic (LED) LV150NL Episcopic * Use an objective lens appropriate to the observation method. : only simple polarizing observation LV-S32 3x2 stage (Stroke: 75 x 50 mm with glass plate) *Can be fitted with LV-S32SPL ESD plate LV-S6 6x6 stage (Stroke: 150 x 150 mm) *Can be fitted with LV-S6WH wafer holder / LV-S6PL ESD plate LV-SRP P revolving stage P-GS2 G stage 2 (Used with stage adapter LV-SAD) or (Microscope camera + imaging software) Integration with Objective lens information detection Objective lens Digital Sight information detection cameras for (when used with combination of Intelligent Nosepiece and control microscopes LV-NU5I and LV-INAD) 4

Combined reflected/transmitted illumination models Manual type Motorized type (Nosepiece / light intensity / aperture stop / observation method selector) Brightfield Darkfield DIC Fluorescence Polarizing Two-beam Phase- Interferometry contrast LV100ND/ Episcopic LV100DA-U Episcopic (LED) Diascopic * Use an objective lens appropriate to the observation method. : only simple polarizing observation LV-S32 3x2 stage (Stroke: 75 x 50 mm with glass plate) *Can be fitted with LV-S32SGH slide glass holder LV-S64 6x4 stage (Stroke: 150 x 100 mm with glass plate) LV-SRP P revolving stage P-GS2 G stage 2 (Used with stage adapter LV-SAD) NIU-CSRR2 Ni-U right handle rotatable ceramic stage (Stroke: 78 x 54 mm) C-SR2S right handle stage (Stroke: 78 x 54 mm: Used with stage adapter LV-SAD) or (Microscope camera + imaging software) Objective lens information detection Information detection and control (when used with combination of Intelligent Nosepiece of objective lens, light intensity, aperture stop, LV-NU5I and LV-INAD) and observation method (brightfield / darkfield / fluorescence) Note: With NIS-Elements L and F, functions above are not available. Use NIS-Elements D/Br/Ar. 5

Evolved optical performance Nikon's CFI60 optical systems are highly evaluated for their unique concept of high NA combined with a long working distance. These lenses have been developed further and evolved achieving the apex in long working distance specifications, correct chromatic aberration, and an optimized lens weight. T Plan & TU Plan Fluor & TU Plan Apo Lenses Standard Plan objective lenses Standard objective lenses Long Semi- Low-magnification objective lenses Semi- fiWveilieddweof WD apo apo TU Plan Fluor Series T Plan EPI EPI/BD 5x/10x/20x/50x/100x Light Fly-eye EPI 1x/2.5x weight lens Enable brightfield, darkfield, simple polarizing, Both clear observation using a conventional analyzer/polarizer and operability-oriented sensitive polarizing, differential interference, and observation without the need of an analyzer/ polarizer are possible. epi-fluorescence observations with just one lens. Achieves superior chromatic aberration performance with long working distance for all magnifications to adapt to any application. Model Magnification NA Working Distance (mm) 1× 0.03 3.8 T Plan EPI 0.075 6.5 (brightfield type) 2.5× Apochromatic objective lenses Long Apo Light WD weight TU Plan Apo Series *Brightfield observation (EPI) objective lens EPI/BD 50x/100x/150x Model Magnification NA Working Distance (mm) *Brightfield observation TU Plan Fluor EPI 5× 0.15 23.5 By using phase Fresnel lenses, these (EPI) objective lens (brightfield type) 0.30 17.5 objective lenses achieve significantly 10× 0.45 4.5 longer operating distances while TU Plan Fluor BD 20× 0.80 1.0 maintaining the superior chromatic (brightfield/darkfield type) 50× 0.90 1.0 aberration performance of apochromatic 100× 0.15 18.0 lenses. Uses fly-eye lens. 0.30 15.0 5× 0.45 4.5 Model Magnification NA Working Distance (mm) 10× 0.80 1.0 TU Plan Apo EPI 20× 0.90 1.0 (brightfield type) 50× 0.8 2.0 50× 100× TU Plan Apo BD 100× 0.9 2.0 (brightfield/darkfield type) 150× 0.9 1.5 50× 0.8 2.0 100× 0.9 2.0 150× 0.9 1.5 Fly-eye lens Darkfield illumination system Through the use of fly-eye As NA and WD improve, objective lenses, the CFI60-2 optical system offers bright darkfield lenses increase in outside illumination throughout the field of view with little diameter. However, as the width of unevenness, even for low- magnification lenses. Fly-eye lenses incident light is fixed, light intensity Annular lenses/ decreases with conventional annular prisms illumination systems. The illumination system uses annular lenses or annular prisms to Fly-eye lenses adjust the diffusion increase captured light and achieve angle of light so light strikes the focal surface without unevenness bright darkfield illumination with no Annular lenses/prisms take in deterioration. more light to increase brightness 6

TU Plan ELWD & T Plan SLWD Lenses Long working distance / Super-long working distance objective lenses Long working distance objective lenses Long Semi- Light Super-long working distance objective lenses WD apo weight TU Plan ELWD Series T Plan EPI SLWD Long Semi- Light *Brightfield observation WD apo weight EPI/BD 20x/50x/100x (EPI) objective lens EPI 10x/20x/50x/100x With the phase Fresnel lenses, these Improving on chromatic aberration objective lenses enable long while prioritizing working distance, working distances while offering higher the T Plan SLWD Series achieve level chromatic aberration correction than the best-in-class super-long conventional objective lenses. This working distance. The SLWD improves operability for samples with 10x (WD: 37 mm) lens enables different heights. use with a greater diversity of samples. Model Magnification NA Working Distance (mm) TU Plan EPI ELWD (brightfield type) 20× 0.4 19.0 TU Plan BD ELWD 50× 0.6 11.0 Model Magnification NA Working Distance (mm) (brightfield/darkfield type) 100× 0.8 4.5 T Plan EPI SLWD 10× 0.2 37.0 (brightfield type) 20× 0.4 19.0 20× 0.3 30.0 50× 0.6 11.0 50× 0.4 22.0 100× 0.8 4.5 100× 0.6 10.0 Color aberration correction and longer working distance through phase Fresnel lenses Color aberration correction Conventional lenses rely upon the refraction of light to form an image. As the strength of refraction varies according to color (wavelength), the image is formed starting with the light closest to the lens, in the order of blue, green, and red. In contrast, a phase Fresnel lens uses the diffraction of light to form an image starting with the light closest to the lens, this time, red, green, and blue, yielding a property opposite that of refraction. Combining these two lenses cancels out the color aberration of each and enables an image with little color aberration. Refracting lens Mutual Realization of Long Working Distance White light cancellation to correct color Correction of color aberration, even with short distances Longer wavelengths mean farther focal point aberration between lenses, is possible with the use of phase Fresnel Phase Fresnel lens lenses. This enables longer working distance than that of conventional lenses. Shorter wavelengths mean closer focal point White light Non-phase Phase Fresnel Fresnel lens lens WD lengthened by amount lens is shortened Other lenses Objective lenses for brightfield/darkfield observation Objective lenses with glass thickness correction features CFI LE Plan EPI/BD CFI L Plan EPI CR EPI 5x/10x/20x/50x/100x 20x/50x/100x BD 5x/10x/20x/50x/ Equipped with corrective features that Model Magnification NA LE Plan EPI enable high contrast observation of cells LE Plan EPI 5× 0.1 or patterns, these observation lenses are (brightfield type) 0.25 Working Distance (mm) unaffected by the glass substrate. 10× 0.4 31.0 LE Plan BD 20× 0.75 13.0 Model Magnification NA Working Distance (mm) (brightfield/darkfield type) 50× 0.9 3.6 20× CR 0.45 10.90 - 10.00 100× 0.1 0.5 CFI L Plan EPI CR 50× CR 0.70 3.90 - 3.00 0.25 0.31 (brightfield type) 0.85 1.20 - 0.85 5× 0.4 18.0 100× CRA 0.85 1.30 - 0.95 10× 0.75 13.0 100× CRB 20× 3.6 50× 0.5 7

Combination with digital camera Objective lens information detection and control Information about the objective lens being used can be detected when combining the Intelligent Nosepiece LV-NU5I and the Nosepiece Adaptor LV-INAD. The information is automatically converted to appropriate calibration data when changing the magnification. In addition, the LV150NA allows switching of objective lenses via the imaging software. LV-NU5I LV-INAD Intelligent Nosepiece Nosepiece Adaptor Digital Digital camera camera DS-Ri2 DS-Fi3 Detection of objective lens information Imaging Software (When using LV-INAD Automatic calibration conversion NIS-Elements combined with LV150N) (with Digital camera Control of objective lens DS-Ri2/DS-Fi3) LV150N / LV100ND / LV150NA Microscope information detection and control The LV100NDA allows detection of information and control of objective lenses, light intensity, aperture stop, and observation method (brightfield / darkfield / fluorescence) via the imaging software, enabling optimization of the conditions vital for image acquisition. Digital Digital camera camera DS-Ri2 DS-Fi3 Detection of objective lens, light intensity, Imaging Software NIS-Elements aperture stop, and observation method (with Digital camera DS-Ri2/DS-Fi3) (brightfield / darkfield / fluorescence) information Automatic calibration conversion Control of objective lens, light intensity, aperture stop, and observation method (brightfield / darkfield / fluorescence) LV100NDA Compatibility Chart of Information Detection and Control by Model : Information detection and control possible LV150N/LV100ND LV150NA LV100NDA : Information detection only DS-Ri2/DS-Fi3 (+NIS-Elements) (When using LV-NU5I and LV-INAD) (When using LV-UEPI2A Illuminator) DS-Ri2/DS-Fi3 (+NIS-Elements) DS-Ri2/DS-Fi3 (+NIS-Elements) Objective lens Reflected illumination *When using (ON/OFF, light intensity adjustment) LV-LH50PC Transmitted illumination (ON/OFF, light intensity adjustment) Aperture stop Observation method selector (brightfield / darkfield / fluorescence) Note: With NIS-Elements L and F, functions above are not available. Use NIS-Elements D/Br/Ar. 8

Digital camera system for microscopes \"Digital Sight System\" Microscope Camera Digital Sight 1000 DS-Fi3 DS-Ri2 Equipped with a 2 megapixel CMOS image sensor, it Three main features of the Capable of expressing images as is, can capture full HD microscope images. By connecting previous models, high-resolution, this microscope digital camera offers a microscope to this camera and HDMI monitor, movies high sensitivity and low noise, high resolution, color reproduction, and images can be captured and saved onto a pre- and high-speed live display are and frame rate. inserted SD card in the camera. offered in 1 camera. 2.0 Color 5.9 Color 16.25 Color megapixel megapixel megapixel Full High- High- HD resolution resolution Frame Rate 30 fps (1920×1080) 30 fps (1440×1024) 45 fps (1636×1088) Max Recordable 1920×1080 2880×2048 4908×3264 Pixels Imaging software NIS-Elements Using a tablet PC Using a desktop PC Simply installing NIS-Elements L on a Image Stitching tablet PC enables setting and control Stitches together images acquired from multiple fields of view of Digital Sight 1000/DS-Fi3/DS-Ri2 to create one image. microscope cameras, live image display, and image acquisition. Wide variety of tools NIS-Elements L enables the conducting of simple measurements on images, with input of lines and comments. These can also be written onto and saved with the image, and measurement data can be output. Measurement function Line distance Circle disance Area Pitch distance Circle Angle Annotate function Marker EDF (Extended Depth of Focus) Line Polyline Arrow Create a single, all-in-focus image from images of differing Text focus. Scene Mode Ten camera setting patterns for optimal color reproduction and contrast for each microscope light source, observation method and type of sample, as well as custom settings, can be selected. • Wafer/IC • Metal, Ceramic/Plastic • Circuit board • Flat Panel Display * See the \"Digital Camera Digital Sight Series for Microscopes\" brochure for details on Digital Sight features. 9

Compatible with a wide range of observation / optical contrast methods: In reflected light mode -brightfield, darkfield, polarizing, differential interference, epi-fluorescence, and two-beam interferometry, and in Transmitted light mode- brightfield, darkfield, polarizing, differential interference, and phase contrast. (Brightfield) (Episcopic DIC) Brightfield Darkfield Episcopic DIC LV150N LV150NA LV100ND LV100NDA LV150N LV150NA LV100ND LV100NDA LV150N LV150NA LV100ND LV100NDA Semiconductors (IC wafers) Semiconductors (IC wafers) Substrate From its objective lenses to its illumination systems, The use of Nikon's unique concepts in the objective Standard-type and high-contrast-type DIC sliders are the LV-N Series offers thorough measures against lens darkfield illumination system enables bright available to match samples. The LV-N Series is effective flare and provides bright, high-contrast images. darkfield observation and provides high-sensitivity for applications such as observation of minute level detection of level differences and defects in samples. differences in devices and precision molds. (Brightfield) (Epi-fluorescence) (Brightfield) (Polarizing) Epi-fluorescence Polarizing Two-beam Interferometry LV150N LV150NA LV100ND LV100NDA LV150N LV150NA LV100ND LV100NDA LV150N LV150NA LV100ND LV100NDA Substrate (solder) Minerals Mica The LV-N Series demonstrates superiority in the The LV-N Series is effective in the observation of Michelson (TI) and Mirau (DI) reflection-type observation of samples with fluorescent properties, samples with birefringent properties, such as liquid two-beam interferometry is possible with the LV-N such as organic ELs or mounted substrates. crystals or plastics/glass containing distortion. Series. When used with micrometer eyepieces, minute level differences can be detected and measured without contact with the sample. (Brightfield) (Phase Contrast) Diascopic Brightfield Phase Contrast Diascopic DIC LV150N LV150NA LV100ND LV100NDA LV150N LV150NA LV100ND LV100NDA LV150N LV150NA LV100ND LV100NDA LCD (color filter) Emulsion Nanoparticle (silver) The LV-N Series is effective in the observation Colorless, transparent samples can be made Colorless, transparent samples can be observed of samples with transparency, such as optical visible through bright/dark contrast and the use of in three dimensions by using polarization to create components, FPDs, and slide glass samples. When diffraction and interference, two properties of light. interference between two beams of light. used in conjunction with the C-SP Simple Polarizer and analyzers, transmitted simple polarized observation is possible. 10

Specifications Base unit Maximum sample height: 38 mm (when used with LVNU5A U5A nosepiece Maximum sample height: 38 mm (when used with LV-S32 3x2 stage) and LV-S32 3x2 stage / LV-S64 6x4 stage) * 73 mm when used with one column riser Nosepieces * 73 mm when used with one column riser Internal LED illumination power source, coarse and fine adjustment knobs Episcopic 12V50W internal power source for dimmer, coarse and fine adjustment knobs Left: coarse and fine adjustment / Right: fine adjustment, 40mm stroke Illuminator Left: coarse and fine adjustment / Right: fine adjustment, 40 mm stroke Coarse adjustment: 14 mm/turn (with torque adjustment, refocusing Coarse adjustment: 14 mm/turn (with torque adjustment, refocusing mechanism) Fine adjustment: 0.1 mm/turn (1 μm/graduation) Eyepiece tubes mechanism) Fine adjustment: 0.1 mm/turn (1 μm/graduation) Stage mounting hole intervals: 70 x 94 (fixed by 4-M4 screw) Stage mounting hole intervals: 70 x 94 (fixed by 4-M4 screw) Stages Eyepieces C-N6 ESD Sextuple Nosepiece ESD LV-NU5A Motorized Universal C-N6 ESD Sextuple Nosepiece ESD Objective lenses LV-NU5 Universal Quintuple Nosepiece ESD Quintuple Nosepiece ESD LV-NU5 Universal Quintuple Nosepiece ESD ESD performance LV-NBD5 BD Quintuple Nosepiece ESD LV-NU5AC Motorized Universal Power consumption LV-NU5I Intelligent Universal Quintuple Nosepiece ESD Quintuple Nosepiece ESD Weight LV-UEPI-N 1.1W white LED LV-LH50PC 12V50W Precentered Lamphouse, LV-LL LED Lamphouse Accepts polarizer/analyzer Bright/darkfield switch and linked aperture stop (centerable), field diaphragm (centerable) Accepts ø 25 mm filter (NCB11, ND16, ND4), polarizer/analyzer, λ plate, excitation light balancer; equipped with noise terminator LV-UEPI2 LV-LH50PC 12V50W Precentered Lamphouse, LV-LL LED Lamphouse HG precentered fiber illuminator: C-HGFIE (with light adjustment) *option Bright/darkfield switch and linked aperture stop (centerable), field diaphragm (centerable), automated optical element switching feature matched to brightfield, darkfield, and epi-fluorescence switch Accepts ø 25 mm filter (NCB11, ND16, ND4), polarizer/analyzer, λ plate, excitation light balancer; equipped with noise terminator LV-TI3 trinocular eyepiece tube ESD (Erected image, FOV: 22/25) LV-TI3 trinocular eyepiece tube ESD (Erected image, FOV: 22/25) LV-TT2 TT2 tilting trinocular eyepiece tube (Erected image, FOV: 22/25) C-TB binocular tube (Inverted image, FOV: 22) C-TB binocular tube (Inverted image, FOV: 22) P-TB Binocular Tube (Inverted image, FOV: 22) P-TB Binocular Tube (Inverted image, FOV: 22) P-TT2 Trinocular Tube (Inverted image, FOV: 22) P-TT2 Trinocular Tube (Inverted image, FOV: 22) LV-S32 3x2 stage (Stroke: 75 x 50 mm with glass plate) ESD compatible LV-S32 3x2 stage (Stroke: 75 x 50 mm with glass plate) LV-S64 6x4 stage (Stroke: 150 x 100 mm with glass plate) ESD compatible ESD compatible LV-S6 6x6 stage (Stroke: 150 x 150 mm) ESD compatible LV-S6 6x6 stage (Stroke: 150 x 150 mm) ESD compatible CFI eyepiece series Industrial Microscope CFI60-2/CFI60 optical system Objective lens series: Combinations in accordance with the observation method 1,000 to 10V, within 0.2 sec. (excluding certain accessories) 1.2 A / 75 W Approx. 8.7 kg 0.1A / 3W Approx. 8.6 kg Approx. 8.6 kg Base unit Maximum sample height: 38 mm (when used with LV-NU5 U5 Maximum sample height: 33 mm (when used with LVNU5AI U5AI nosepiece and LV-S32 3x2 stage / LV-S64 6x4 stage) nosepiece and LV-S32 3x2 stage / LV-S64 6x4 stage) Nosepieces 12V50W internal power source for dimmer, coarse and fine adjustment knobs 12V50W internal power source for dimmer, coarse and fine adjustment Episcopic Left: coarse and fine adjustment / Right: fine adjustment, 40 mm stroke knobs Left: coarse and fine adjustment / Right: fine adjustment, 40 mm stroke Illuminators Coarse adjustment: 14 mm/turn (with torque adjustment, refocusing Coarse adjustment: 14 mm/turn (with torque adjustment, refocusing mechanism) mechanism) Fine adjustment: 0.1 mm/turn (1 μm/graduation) Fine adjustment: 0.1 mm/turn (1 μm/graduation) Diascopic Illuminator C-N6 ESD Sextuple Nosepiece ESD, LV-NU5 Universal Quintuple Nosepiece ESD LV-NU5AI Motorized Universal Quintuple Nosepiece Eyepiece tubes LV-NBD5 BD Quintuple Nosepiece ESD, LV-NU5I Intelligent Universal Quintuple Nosepiece ESD (High-durability motorized 5-hole universal nosepiece) Stages D-ND6 Sextuple DIC Nosepiece Condensers Eyepieces LV-UEPI-N LV-UEPI2A Objective lenses LV-LH50PC 12V50W Precentered Lamphouse, LV-LL LED Lamphouse LV-LH50PC 12V50W Precentered Lamphouse, LV-LL LED Lamphouse ESD performance Bright/darkfield switch and linked aperture stop (centerable), HG precentered fiber illuminator: C-HGFIE (with light adjustment: PC Power consumption field diaphragm (centerable), accepts ø 25 mm filter (NCB11, ND16, ND4), controlled) *option Weight polarizer/analyzer; equipped with noise terminator Motorized operation and control of illumination selector turret LV-UEPI2 Motorized aperture stop linked to bright/darkfield selector (automatic LV-LH50PC 12V50W Precentered Lamphouse, LV-LL LED Lamphouse optimization matched to objective lens), field diaphragm (centerable) HG precentered fiber illuminator: C-HGFIE (with light adjustment) *option Accepts ø 25 mm filter (NCB11, ND16, ND4), polarizer/analyzer, λ plate, Bright/darkfield switch and linked aperture stop (centerable), excitation light balancer; equipped with noise terminator field diaphragm (centerable), automated optical element switching feature matched to brightfield, darkfield, and epi-fluorescence switch Accepts ø 25 mm filter (NCB11, ND16, ND4), polarizer/analyzer, λ plate, excitation light balancer; equipped with noise terminator LV-LH50PC 12V50W Precentered Lamphouse (Fly Eye optical system) Internal aperture, field diaphragm, filter (ND8, NCB11); transmitted/reflected selector switch; 12V100W also available (option) LV-TI3 trinocular eyepiece tube ESD (Erected image, FOV: 22/25), LV-TT2 TT2 tilting trinocular eyepiece tube (Erected image, FOV: 22/25), P-TB Binocular Tube (Inverted image, FOV: 22), P-TT2 Trinocular Tube (Inverted image, FOV: 22) LV-S32 3x2 stage (Stroke: 75 x 50 mm with glass plate) / LV-S32SGH slide glass holder LV-S64 6x4 stage (Stroke: 150 x 100 mm with glass plate), LV-SRP P revolving stage / P-GS2 revolving stage: Used with stage adapter LV-SAD NIU-CSRR2 Ni-U right handle rotatable ceramic stage (Stroke: 78 x 54 mm), C-SR2S right handle stage (Stroke: 78 x 54 mm: Used with stage adapter LV-SAD) LWD achromat condenser (brightfield), LV-CUD U condenser dry (phase contrast, diascopic DIC, darkfield), Achromat 2x-100x slide condenser (brightfield), DF dry condenser (darkfield), and others CFI eyepiece series Industrial Microscope CFI60-2/CFI60 optical system Objective lens series: Combinations in accordance with the observation method 1,000 to 10V, within 0.2 sec. (excluding certain accessories) 1.2 A / 75 W 1.2 A / 90 W Approx. 9.5 kg Approx. 10 kg 11

Lens Specifications Type Model Magnification Product Code No. NA Working Distance (mm) T Plan EPI 1× MUE12010 0.03 3.8 Plan (Semi-apochromat) 2.5× MUE12030 0.075 6.5 TU Plan Fluor EPI 5× MUE12050 0.15 23.5 Universal Plan Fluor (Semi-apochromat) 10× MUE12100 0.3 17.5 Brightfield 20× MUE12200 0.45 4.5 50× MUE12500 0.8 1.0 100× MUE12900 0.9 1.0 TU Plan Apo EPI 50× MUC11500 0.8 2.0 Universal Plan Apo (Apochromat) 100× MUC11900 0.9 2.0 150× MUC11150 0.9 1.5 Polarizing TU Plan Fluor EPI P 5× MUE13050 0.15 23.5 Polarizing Universal Plan Fluor 10× MUE13100 0.3 17.5 20× MUE13200 0.45 4.5 (Semi-apochromat) 50× MUE13500 0.8 1.0 100× MUE13900 0.9 1.0 Brightfield TU Plan EPI ELWD 20× MUE21200 0.4 19.0 Long Working Long Working Distance Universal Plan 50× MUE21500 0.6 11.0 100× MUE21900 0.8 4.5 Distance (Semi-apochromat) Brightfield T Plan EPI SLWD 10× MUE31100 0.2 37.0 Super-long Working Super-long Working Distance Plan 20× MUE31200 0.3 30.0 50× MUE31500 0.4 22.0 Distance (Semi-apochromat) 100× MUE31900 0.6 10.0 TU Plan Fluor BD 5× MUE42050 0.15 18.0 Universal Plan Fluor (Semi-apochromat) 10× MUE42100 0.3 15.0 20× MUE42200 0.45 4.5 Brightfield/Darkfield 50× MUE42500 0.8 1.0 100× MUE42900 0.9 1.0 TU Plan Apo BD 50× MUC41500 0.8 2.0 Universal Plan Apo (Apochromat) 100× MUC41900 0.9 2.0 150× MUC41150 0.9 1.5 Brightfield/Darkfield TU Plan BD ELWD 20× MUE61200 0.4 19.0 Long Working Long Working Distance Universal Plan 50× MUE61500 0.6 11.0 Distance 100× MUE61900 0.8 4.5 (Semi-apochromat) : Phase Fresnel lens (diffraction optical element) type A circular polarizing plate and depolarizer are built into T Plan EPI 1x/2.5x. (Circular polarizing plate can be attached/detached.) Type Model Magnification Product Code No. NA Working Distance (mm) Brightfield 0.45 10.9 - 10.0 With Correction L Plan EPI CR 20× MUE35200 0.7 3.9 - 3.0 Mechanism For Inspecting LCDs Plan 0.85 1.2 - 0.85 50× MUE35500 0.85 1.3 - 0.95 0.65 1.0 100× MUE35900 0.95 0.4 0.95 0.3 100× MUE35910 0.9 0.51 0.9 0.42 Brightfield L Plan EPI Plan (Achromat) 40× MUE00400 0.1 31.0 Brightfield 0.25 13.0 LU Plan Apo EPI 100× MUC00090 0.4 3.6 Universal Plan Apo (Apochromat) 0.75 0.5 150× MUC10151 0.9 0.31 0.1 18.0 Brightfield/Darkfield LU Plan Apo BD 100× MUC40900 0.25 13.0 Universal Plan Apo (Apochromat) 0.4 3.6 150× MUC50151 0.75 0.5 LE Plan EPI (Achromat) 5× MUD00050 10× MUD00100 Brightfield 20× MUD00200 50× MUD00500 100× MUD00900 LE Plan BD (Achromat) 5× MUD10050 Brightfield/Darkfield 10× MUD10100 20× MUD10200 50× MUD10500 12

Dimensions 558 559 [LV-LL] [LV-LH50PC] 277 393 277 393 506 519 251 362 362 656 657 [LV-LH50PC] [LV-LL] 251 362 362 ��� ��� 462 462 462 277 277 277 ��� ��� ��� ��� 516 516 516 251 251 362 362 ��� ��� 251 362 13

System Diagram for LV150N/LV150ND/LV100NDA/LV100NDA C-mount CCD Camera �������� ������������������ �������� �������� �������� �������� �������� �������� �������� �������������� ������� ������������ ������� ���� ������������������ ���� �������� ���������������� �������� �������� ������ ������� ������ ������ �������� �������� �������� �������� ������ �������� �������� �������� ������ ������� ������� ������� ������� ������ ���� ���� �������� �������� �������� �������� ������� ������� ����� �������� T ������ ���������� �������� �������� �������� ��� ������ ������� ������� ������� ����������� �������� �������� �������� �������� �������� F ����� ������ ���� ��������������� �������������� ����������� �������������� F ����������� F ���� FG ���� G F �������� G ��������� ���� �������� �������� H B B ��������������� �������� �������� ����������� H B ������ �������� B ��������������� C D ����� A B V ������������ C E H �������� A �������� ������������� C D V H E �������� ����������������� �������� A ����� P ��������� P P P’ P P �������� Q �������� �������� �������� �������� ������ ������� ������������� �������� �������� �������� ������ ������� ���� ��������� �������������� ������������� ������������� ���� ������� �������� ��������� ��������� ������������� �������������� �������������� �������� P’ �������� �������� �������� �������������� ���������� ������������� �������������������������������� ���������� ������� ������������������ ���������� ����������������� �������� R ������������� ������������� ������������� ������������� ������������� �������� ������������� ����� �������� ������� ����������������� ������� ��������� ����� ������������ Q ������������ �������� ������� �������������� �������� ���������� ������ ���������� ���������� ������������������� ���������� ���� ������� ����������������� ���� ���� �������������������� ���� ���������������������� ������������� �������������� ������������ ������������� ���� �������� ������������� S ������������� �������������� �������� �������� �������� �������� �������� ������������� ������������� �������� �������� ���������� ���� ������ �������� ������ �������� ������� ���� ���� ��������� �������� ���� ������� ��������� ����������� ������ ������ ������������� ��������� ��������� ����� ���������� ��������� ��������� ������������ �������� �������� ��������� ��������� ��� ��������������� ������ ������ ��������� �������� ��������� �������� �������� V D ��� ���� ���������� ��������� �������� ���� ������������ 14

�������� �������� �������� �������� �������� �������� �������� ������� ��������� ��������� ������ ������ ������� ������� ������� ������� ���� ��� ������ ��������� ��������� ������� ��������� G ��� F ��� ������������� ������������� �������� N ������������ ����� �������� �������������� ����������� T �������� �������� �������� ������������������������������� ������������� ������ N MO ������������ �������� ������������� E J L T E’ M ������� KJ I �������� ����������� �������� I �������� ��������������� �������� ������ ������������������� ����������������������������������������������� �������� ���������� �������� N MO ���������������� �������� ���������������������� E K ��������� ����������������� ����������������� �������� K J I E’ �������� �������� ������������������������������������ ���������������� ������� O ������������ L E �������� �������� ����� ������ ����������� ���������������� �������� �������� J I B ������� B B �������� ������� A �������� H ����������������������������������� �������� ������ A �������� H �������� ��������� ����� ������ ��������� ��������� A ���������������� ��������������� �������� ������ ������������������ BB ������������� �������� C A A D �������� V �������� �������� ������� �������� ����� ������ ��������������� ��������������� ����������������� ������������������ ������������������ ������������� E E �������� U ����������� ����� �������� �������� ���� U ���������������� ��������� ������� ��������� ����������� ������� ���������������������� ������������� ������������� ����������� ��������� RS �������� �������� �������� �������� �������� E’ E” E” Q ����� ��� ������������� ���������� ��������� �������� �������� ������������� ������������ ����������� ����������� �������� ������������� ��������� ������������ �������� ������������� ���������������� ������� ����������������� �������� �������� ������������ E ��������� �������������� ������� E” ������������ �������� ����������� ������������ �������������� �������� �������� �������� �������� ��������� ������ ������� ������ ������������ ������������ ��������� ����������� ������ ����� �������� �������� ��������� �������� �������� �������� ������ ����� ������ ����������������� ��������� ������������������ �������������� �������� �������� �������� �������� ������ ���������������� ��������������� �������������������� ��������� ���������������� C 15

System Diagram for LV150NL C-mount CCD Camera C-mount C-mount C-mount A TV Adapter A Adapter Adapter 0.7x 0.55x CFI UW LV-10× LV-TV L-DIC LV-NU5 C-N6 10× ESD CFI 10× TV Adapter DIC Prism NU5 ESD6 L-DIHC Nosepiece Nosepiece High Contrast G ø25 F ø22 C-TB DIC Prism LU Nosepiecce Binocular Adapter F Tube F LV-TI3 G Trinocular 0.5× Tube TI3 Tube G Unit L-S6WH LV-S6PL C TU Plan EPI LE Plan Wafer Holder6 ESD Plate LV150NL-LED EPI Objective Lens Objective Lens LV-S32PL L-AN ESD Plate Analyzer C LV-PO Polarizer A LV-CR LV-UPO Polarizer B Column Riser 35 LV-S32 LV-S6 6x6 Stage 3x2 Stage B Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. July 2020 ©2012-2020 NIKON CORPORATION N.B. Export of the products* in this brochure is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedures shall be required in case of export from Japan. *Products: Hardware and its technical information (including software) Company names and product names appearing in this brochure are their registered trademarks or trademarks. NIKON CORPORATION ISO 14001 Certified Shinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, Japan for NIKON CORPORATION phone: +81-3-6433-3701 fax: +81-3-6433-3784 https://www.nikon.com/products/industrial-metrology/ ISO 9001 Certified http://www.nikonmetrology.com/ for NIKON CORPORATION Industrial Metrology Business Unit NIKON METROLOGY EUROPE NV NIKON METROLOGY, INC. NIKON MALAYSIA SDN BHD Geldenaaksebaan 329, 3001 Leuven, Belgium 12701 Grand River Avenue, Brighton, MI 48116 U.S.A. MALAYSIA phone: +60-3-7809-3688 fax: +60-3-7809-3633 phone: +32-16-74-01-00 fax: +32-16-74-01-03 phone: +1-810-220-4360 fax: +1-810-220-4300 PT. NIKON INDONESIA E-mail: [email protected] E-mail: [email protected] INDONESIA phone: +62-267-864-3949 fax: +62-267-864-3950 http://www.nikonmetrology.com/en-gb http://www.nikonmetrology.com/en-us E-mail: [email protected] NIKON METROLOGY UK LTD. NIKON CANADA INC. UNITED KINGDOM phone: +44-1332-811-349 fax: +44-1332-639-881 CANADA phone: +1-905-602-9676 fax: +1-905-602-9953 NIKON SALES (THAILAND) CO., LTD. THAILAND phone: +66-2633-5100 fax: 66-2633-5191 E-mail: [email protected] NIKON MEXICO- Metrology Showroom MEXICO phone: +52 (442) 688 50673 NIKON INDIA PRIVATE LIMITED NIKON METROLOGY SARL INDIA phone: +91-124-4688500 fax: +91-124-4688527 FRANCE phone: +33-1-60-86-09-76 fax: +33-1-60-86-57-35 E-mail: [email protected] E-mail: [email protected] NIKON INSTRUMENTS (SHANGHAI) CO., LTD. CHINA (Shanghai branch) phone: +86-21-6841-2050 fax: +86-21-6841-2060 NIKON METROLOGY GMBH (Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026 GERMANY phone: +49-6023-91733-0 fax: +49-6023-91733-229 (Guangzhou branch) phone: +86-20-3882-0551 fax: +86-20-3882-0580 E-mail: [email protected] NIKON INSTRUMENTS KOREA CO., LTD. KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415 NIKON INSTRUMENTS S.p.A. ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93 NIKON SINGAPORE PTE LTD. SINGAPORE phone: +65-6559-3651 fax: +65-6559-3668 Printed in Japan (2007-2.0) Am/M E-mail: [email protected] 2CE-KHOH-9