SECS_GEM Spec for any machine

Automation Equipment Engineering Table of Contents 1. Introduction 3 2. SECS-II Message Summary 4 3. Remote Commands 6 4. Equipment Capabilities 7 5. Variable Item Dictionary 8 6. Collection Events 9 7. GEM Compliance Statement 10 8. Applicable Documents 11 2

Automation Equipment Engineering 1. Introduction This document describes the requirement of SECS-GEM software interface provided on the equipment. 1.1 SECS Standard Semiconductor Equipment and Materials International (SEMI) publish the SEMI Equipment Communication Standard (SECS). It defines a computer to computer communications interface between a unit of factory Equipment and a Host Computer. Bobcat /Cheetah systems complies to the complete SECS- I standard, and with the generic portions of the SECS-II standard, and implements an appropriate subset of the SECS-II standard messages. The Equipment complies with the following versions of standards: E4-0699 (SECS-I) E5-1000 (SECS-II) 1.2 HSMS Standard Semiconductor Equipment and Materials International (SEMI) publish the SEMI Equipment Communications Standard (SECS). The High-Speed SECS Message Service (HSMS) Standard is also published by SEMI. Together, they define a computer to computer communications interface between a unit of factory Equipment and a Host Computer. This Equipment complies to the complete HSMS-SS (SS stands for ‘Single-Session’) standard, and to the generic portions of the HSMS and SECS-II standards. The Equipment complies to the following versions of standards: E5-1000 (SECS-II) E37-0298 (HSMS) E37.1-96 (HSMS-SS) 1.3 GEM Standard The SEMI Generic Equipment Model for Effective Factory Automation (GEM) is another document published by SEMI. The GEM standard defines some useful conventions for designing the communications interface on a unit of factory Equipment to improve operations with a Host Computer. The Equipment complies to the following GEM document 3

Automation Equipment Engineering 2. SECS-II Message Summary STREAM 0 SxF0 Abort Transaction S,H->E STREAM 1 S,H->E,Reply S,H<-E S1F1 Are You There Request (R) S,H->E,Reply S1F2 On Line Data (D) M,H<-E S1F3 Selected Equipment Status Request (SSR) S,H->E,Reply S1F4 Selected Equipment Status Data (SSD) M,H<-E S1F11 Status Variable NameList Request (SVNR) S,H->E,Reply S1F12 Status Variable NameList Reply (VNRR) S,H<-E S1F13 Establish Communication Request (CR) S,H->E,Reply S1F14 Establish Communication Request Acknowledge (CRA) S,H<-E S1F15 Request OFF-LINE (ROFL) S,H->E,Reply S1F16 OFF-LINE Acknowledge (OFLA) S,H<-E S1F17 Request ON-LINE (RONL) S1F18 ON-LINE Acknowledge (ONLA) S,H->E,Reply M,H<-E STREAM 2 S,H->E,Reply S,H<-E S2F13 Equipment Constant Request (ECR) S,H<->E,Reply S2F14 Equipment Constant Data (ECD) S,H<->E S2F15 New Equipment Constant Send (ECS) S,H->E,Reply S2F16 New Equipment Constant Acknowledge (ECA) S,H<-E S2F17 Date and Time Request (DTR) S,H->E,Reply S2F18 Date and Time Data (DTA) S,H<-E S2F29 Equipment Constant Namelist Request (ECNR) S,H->E,Reply S2F30 Equipment Constant Namelist (ECN) S,H<-E S2F31 Date and Time Set Request (DTS) S,H->E,Reply S2F32 Date and Time Set Acknowledge (DTA) S,H<-E S2F37 Enable/Disable Event Report (EDER) M,H->E,Reply S2F38 Enable/Disable Event Report Acknowledge (EDEA) S,H<-E S2F41 Host Command Send (HCS) M,H->E,Reply S2F42 Host Command Acknowledge (HCA) S,H<-E S2F33 Define Report (DR) S2F34 Define Report Acknowledge (DRA) S,H->E,Reply S2F35 Link Event Report (LER) S,H<-E S2F36 Link Event Report Acknowledge (LERA) S,H->E,Reply M,H<-E STREAM 5 S5F3 Enable/Disable Alarm Send(EAS) S5F4 Enable/Disable Alarm Acknowledge(EASA) S5F5 List Alarm Request(LAR) S5F6 List Alarm Data(LAD) 4

Automation Equipment Engineering STREAM 6 S6F5 Multi-block Data Send Inquire (MBI) S,H<-E S6F6 Multi-block Grant (MBG) S,H->E S6F11 Event Report Send (ERS) M,H<-E S6F12 Event Report Acknowledge (ERA) S,H->E STREAM 7 S,H->E,Reply S7F1 Process Program Load Inquire(PPI) S,H<-E S7F2 Process Program Load Grant(PPG) M,H->E,Reply S7F3 Process Program Send(PPS) S,H<-E S7F4 Process Program Acknowledge(PPA) S,H->E,Reply S7F5 Process Program Request(PPR) M,H<-E S7F6 Process Program Data(PPD) S,H->E,Reply S7F17 Delete Process Program Send(DPS) S,H<-E S7F18 Delete Process Program Acknowledge(DPA) S,H->E,Reply S7F19 Current EPPD Request(RER) M,H<-E S7F20 Current EPPD Data(RED) S,H<-E STREAM 9 S,H<-E S,H<-E S9F1 Unrecognized Device ID (UDN) S,H<-E S9F3 Unrecognized Stream Type (USN) S,H<-E S9F5 Unrecognized Function Type (UFN) S,H<-E S9F7 Illegal Data (IDN) S,H<-E S9F9 Transaction Timer Timeout (TTN) S9F11 Data Too Long (DLN) S,H<-E S9F13 Conversion Timeout (CTN) S,H->E S,H->E,Reply STREAM 10 S,H<-E M,H->E,Reply S10F1 Terminal Request (TRN) S,H<-E S10F2 Terminal Request Acknowledge (TRA) S10F3 Terminal Display, Single(VTN) S,H->E,Reply S10F4 Terminal Display, Single Acknowledge(VTA) S,H<-E S10F5 Terminal Display, Multi-block(VMN) M,H->E,Reply S10F6 Terminal Display, Multi-block Acknowledge(VMA) S,H<-E S,H->E,Reply STREAM 12 (if applicable) M,H<-E S,H->E,Reply S12F1 Map Set-up Data Send (MSDS) S,H<-E S12F2 Map Set-up Data Acknowledge (MSDA) S,H->E,Reply S12F3 Map Set-up Data Request (MSDR) M,H<-E S12F4 Map Set-up Data (MSD) S12F5 Map Transmit Inquire (MAPT1) S12F6 Map Transmit Grant (MAPTG) S12F9 Map Data Send Type 2 (MDS2) S12F10 Map Data Acknowledge Type 2 (MDA2) S12F15 Map Data Request Type 2 (MDR2) S12F16 Map Data Type 2 (MD2) 5

Automation Equipment Engineering Abbreviations: S = Single block / M = Multi block H = Host / E = Equipment -> valid direction reply (required) [reply] (optional) 3. Remote Commands In the REMOTE mode the host has full control of the equipment. Some remote commands have a long execution time, so in order to prevent transaction timeouts, the equipment interprets all remote commands as 'request action be initiated' rather than 'do action'. If the command is executable, the equipnemt responds that the command 'is going to be performed' and then reports 'command completed' only on successful completion. Note: The computer in the equipment always gives priority to production computing requirements over host communication requirements. Remote commands available include: START Starts automatic processing (see below) only available when the equipment is ' ready'. If it follows a stop command (local or remote) processing automatically restarts from the stop point. STOP Stops automatic processing. The equipment stops after completing the current device. This command is only available when the equipment is running. INIT Initialize all the mechanical axes. PP-SELECT Loads a process program (recipe) from the equipment storage into the operating memory. RESET Resets statistics. (if applicable). 6

Automation Equipment Engineering 4. Equipment Capabilities The following capabilities are required: - Establish Communications - Event Data Collection - Variable Data Collection - Status Data Collection - On-line Identification - Alarm Management - Remote Control - Equipment Constants - Terminal Services - Process Program (Recipe) Management - Error Messages - Clock - Control 7

Automation Equipment Engineering 5. Variable Item Dictionary This section gives a list of the required variable data items (status variables - SVs, data variables - DVVALs) and equipment constant values - ECVs) required by GEM. It also includes all the additional equipment capabilities. E.g.: Total Output counter - Good counter - Reject counter - Proces parameters - Control state - Process state - Equipment model - Equipment name - Software revision - 8

Automation Equipment Engineering 6. Collection Events The following sections specify the collections events list required by HOST: Start Key: Start Key Remote: The start soft key in the REMOTE menu has been pressed. States Change: The PROCESS state has changed. Change Process State The CONTROL state has changed. Change Control State Exceptions: Material Warning Intervention required, but operation continues. Equipment Warning Unexpected condition, but operation continues. Material Stop Intervention required, but operation may resume after assistance. Equipment Stop Intervention required, but operation may resume after assistance. System Error Equipment shutdown necessary, no recovery. Equipment Constant Events: Operator Equipment Constant Operator has changed an equipment constant.change Process Program Management: A process program has been created, edited or deleted by the operator. Process Program Change A process program has been selected (loaded). Process Program Select Note: All event reports must be able to enable or disable with the message S2,F37 or in the equipment configuration menu (which also allows individual report types to be enabled/disabled). The status variable (SV) “EventsEnabled” gives the actual states of all event reports. 9

Automation Equipment Engineering 7. GEM Compliance Statement This GEM Compliance Statement accurately indicates for each capability whether it has been implemented, and whether the implementation is in a GEM compliant manner. The sample GEM Compliance Statement for the equipment is given in the following Table. GEM COMPLIANCE STATEMENT Fundamental GEM Requirements Implemented GEM Compliant State Models Yes / No Yes / No Equipment Processing States Yes / No Yes / No S1,F13/F14 Scenario Yes / No Yes / No Event Notification Yes / No Yes / No On-line Identification Yes / No Yes / No Error Messages Yes / No Yes / No Control (Operator Initiated) Yes / No Yes / No Documentation Yes / No Yes / No Additional GEM Capabilities Implemented GEM Compliant Establish Communications Yes / No Yes / No Dynamic Event Report Configuration 1) Yes / No Yes / No Variable Data Collection Yes / No Yes / No Trace Data Collection Yes / No Yes / No Status Data Collection Yes / No Yes / No Alarm Management Yes / No Yes / No Remote Control r Yes Yes / No Yes / No Equipment Constants Yes / No Yes / No Process Program Management Yes / No Yes / No Material Movement Yes / No Yes / No Equipment Terminal Services Yes / No Yes / No Clock Yes / No Yes / No Limits Monitoring Yes / No Yes / No Spooling Yes / No Yes / No Control (Host Initiated) Yes / No Yes / No 10

Automation Equipment Engineering 8. Applicable Documents SEMI Standards Abbreviation Title Version Source SECS-I SEMI Equipment Communications Standard 1, SEMI E4-91 SEMI Message Transfer (SECS-I). (95) SECS-II SEMI Equipment Communications Standard 2, SEMI E5-95 SEMI Message Content (SECS-II). GEM SEMI Generic Model for Communications and Control SEMI E30-95 SEMI of SEMI Equipment (GEM). 11