Revised_User Manual-Secondary Crane LMPV Pivot 55Kv DT- PVD 102401603 (002)

Secondary Crane, LMPV, Pivot 55Kv DT- PVD 102401603 User Manual Marketech International Corp. No.6, Dali 2nd Rd., Tainan Science-Based Industrial Park, Tainan City 74144, Taiwan Phone: +886-6-505-5666 FAX: +886-6-505-5082 Website: www.micb2b.com Email: [email protected]

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 Table of Contents 1 Introduction ......................................................................................................................2 2 Standard Safety Operation and User Guide.....................................................................2 2.1 Product Usage ...........................................................................................................2 2.2 Safety Operation .......................................................................................................2 3 Product Description .........................................................................................................3 4 Product Assembly .......................................................................................................... 4-6 5 Product Architecture .......................................................................................................7 6 Safety Device Configuration ............................................................................................8 7 Operation .........................................................................................................................9 7.1 Operator position ..................................................................................................9 7.2 Lifting、lowering and moving the LV gear drive ............................................... 9-10 8 Warning label .................................................................................................................11 9 Cleaning and Maintenance ............................................................................................11 9.1 Cleaning .................................................................................................................11 9.2 Maintenance .........................................................................................................11 1

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 1 Introduction The user manual provides information of product operation, safety information and maintenance guide, etc. All pictures shown are for illustration purpose only. Actual product may vary due to product enhancement. 2 Standard Safety Operation and User Guide 2.1 Product Usage This secondary crane, which is a part of the lifting device and built for the Pivot 55Kv DT LM1 model, hoists and moves the LV gear drive. 2.2 Safety Operation Moving the pulley and the steel beam gently and carefully. Make sure the fixed-pins are in the correct position. Lifting weight over 150kg should NOT be allowed. The LV gear drive must be balanced and stable while being lifted by the secondary crane. Using the secondary crane for other purposes instead of lifting the LV gear drive should NOT be allowed. Always facing the secondary crane while anyone is operating it. Do NOT operate the secondary crane with belts and chains tangled. Operating the secondary crane without wearing safety equipment should NOT be allowed. Anyone right beneath the hoisted LV gear drive should NOT be allowed under any circumstance. 2

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 3 Product Description Product weight: 240kg Qty. Max loading: 150kg 1 Item Description Secondary Crane, LMPV, Pivot 55Kv DT- PVD 102401603 1 (L x W x H=2575 x 225 x1665) 3

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 4 Product Assembly Installing the secondary crane requires you to follow several steps. First, make sure fixed pins (red color) are in the same position as the pic 1 below. The T-shaped pin inserted in this hole is to restrict the steel beam at the 0- degree position. (Pic 1) Pic 1 Second, use the proper hoisting accessory to connect the secondary crane and the factory crane for hoisting. Consult AMAT engineering department before hoisting. Working Load Limit (WLL) of the hoisting accessory is 1 ton at least. (Pic 2) Pic 2 4

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 Third, move the secondary crane to the top of the LM1 chamber, and then gently move the secondary crane to align the holes of the bottom plate with four M16 tapped holes as pic 3 below. (Please consult the engineering department of Applied Materials first for correct direction) Pic 3 Fourth, lower down the secondary crane until it touches the chamber and also slightly adjust the holes on the bottom plate to align with the tapped holes on the chamber. (Pic 4) 5

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 M16 x P2.0 x 50(4x) Pic 4 Fifth, insert the screws into the split washers and flat washers with the right sequence. Next, fasten the screws and washers into the mounting holes. Once four screws are fastened into the holes, begin turning the head of the screws with the appropriate size torque wrench. Tighten four screws evenly down to the washer until the head contacts the washer and the torque reaches 162 ft-lbf. (Pic 5) M16 Screw SPLIT Washer FLAT Washer The top of LM1 Chamber Pic 5 6

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 Caution: For the best fastening status, the external thread must fully contact with straight internal thread after the four screws are fastened with the torque wrench. In addition, its length is no less than 18mm.  X 7

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 Lugs 5 Product Architecture Steel Beam Lock Plate & Fixed Pins Button Plate Pulley Cushion Rubbers The idle Holes A hole for 45° Lock Plate A hole for 0° 8

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 6 Safety Device Configuration Lock Plate, which has pinholes, allows anyone to lock the steel beam at the 0-degree or the 45-degree angle. 0° 45° 9 Tip The T-Shape Pin can be inserted smoothly on condition that an upper hole and a lower hole on The Lock Plate are aligned properly. Therefore, if it is hard to insert, the steel beam will need to move slightly to align the holes.

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 7 Operation 7.1 Operator position Operator 1, who stands by the secondary crane, is responsible for operating the fixed pin and being alert to the whole operation to avoid any potential hazard. Operators 2&3, who stand next to the LV gear drive hoisted on the secondary crane, are responsible for stabilizing and moving the LV gear drive. Caution: The secondary crane needs three operators at least to control it for safety requirements. 7.2 Lifting、lowering and moving the LV gear drive Step Diagram Instruction Ensure the secondary crane on the top of the LM1 1 model machine fixed firmly. Ensure the stopping plate secured firmly on the 2 steel beam. Pull the T-Shape fixed pin out the hole of the 0- 3 degree angle and insert it into the idle hole. Adjust the degree of the steel beam to 0° or 45°. It 4 depends on where you want to lift the LV gear drive. 10

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 If the LV gear drive is lifted from the ground when 5 the steel beam is at 0°, insert the T-Shape fixed pin 0° into the 0° hole and skip the sixth step. If not, skip this step. 6 45° If the LV gear drive is lifted from the ground when the steel beam is at 45°, insert the T-Shape fixed pin into the 45° hole. 7 Lift the LV gear drive with the secondary crane. Pull the T-Shape fixed pin out and insert it into the idle hole, adjust the steel beam and pulley to move 8 the LV gear drive to install it (Please consult AMAT Engineering department for installment.). After the LV gear drive installment is done, the 9 operator could store the hook and chain on the hanger. Rotate the steel beam to the 0-degree angle and 10 put the T-Shape fixed pin in the hole of the 0- degree angle. 11

Secondary Crane, LMPV, Marketech International Corp. Pivot 55Kv DT- PVD 102401603 Description 8 Warning label Warning Label Watch your hand. Moving part could trigger potential hazards. 9 Cleaning and Maintenance 9.1 Cleaning Use the dust-free paper to clean the secondary crane. 9.2 Maintenance Weekly Maintenance A. Ensure every screw on the secondary crane is tightened according to the torque of AMAT specification. B. Ensure the T-Shape fixed pin is capable of being put in the idle hole, the holes of the 0-degree angle and the 45-degree angle. C. Ensure the steel beam is capable of being rotated from the 0-degree angle to the 45-degree angle. D. Ensure the pulley is capable of being operated within the distance between cushion rubbers. E. Clean the secondary crane with the dust-free paper. Monthly Maintenance A. Ensure there is no appearance defect that relates to fatigue deformation and rustiness on the secondary crane. B. Ensure the secondary crane is operated smoothly while performing the item B/C/D in the weekly maintenance of 9.2 Maintenance. C. Ensure the surface of the cushion rubber is no lower than the screw heads in the cushion rubber. If any malfunction or defect is found by executing Weekly Maintenance and Monthly Maintenance, please feel free to contact MIC for further maintenance work. 12